Polycrystalline PbZr0.52Ti0.48O3 (PZT) thin films with different thicknesses were prepared by metal-organic decomposition (MOD) at different thermal decomposition temperatures, and their effective elastic constants were evaluated with X-ray diffraction (XRD) techniques. The relative intensities of textures in the thin films were analyzed from XRD patterns, and the effective elastic constants were calculated by averaging over orientations according to the relative intensities. On the other hand, Gaussian distribution functions were used to fit the normalized intensities of (001) pole figures, and the effective elastic constants of PZT thin films were calculated according to the grains’ orientation distribution described by Gaussian distribution functions. The results show that the effective elastic constants of PZT polycrystalline thin films evaluated by XRD patterns are in good agreement with those evaluated by pole figures, and the differences are within 10%. The effective elastic constants of PZT thin films are greatly affected by the thermal decomposition temperature, while the effects of thickness of thin films are relatively small.
PZT thin film effective elastic constant XRD pattern pole figure orientation average Gaussian fit
This is a preview of subscription content, log in to check access.
MOAZZAMI R, HU C, SHEPHERD W H. Electrical characteristics of ferroelectric PZT thin films for DRAM applications[J]. IEEE Transactions on Electron Devices, 1992, 39: 2044–2049.CrossRefGoogle Scholar
ZUO Liang, XU Jia-zhen, LIANG Zhi-de. Averaging fourth-rank elastic tensors for textured polycrystalline aggregates without physical symmetry[J]. Journal of Applied Physics, 1989, 66(6):2338–2341.CrossRefGoogle Scholar
ZHANG Ming, HE Jia-wen. Calculation of the elastic constants of TiN thin films with fiber textures[J]. Progress in Natural Science, 2001, 11(2): 168–172. (in Chinese)Google Scholar
ZHENG Xue-jun, ZHOU Yi-chun, ZHANG H. Dependence of fracture toughness on temperature in PZT thin films produced by metal organic decomposition[J]. Journal of Materials Research, 2003, 18(3): 578–584.CrossRefGoogle Scholar
ROE R J. Description of crystallite orientation in polycrystalline materials III: General solution to pole figure inversion[J]. Journal of Applied Physics, 1965, 36(6): 2024–2031.CrossRefGoogle Scholar
HEIFETS E, COHEN R E. Ab initio study of elastic properties of Pb(Ti,Zr)O3[C]//Proceeding of Fundamental Physics of Ferroelectrics. Washington D C: American Institute of Physics, 2002.Google Scholar
GONG J, ZANGARIA G. Electrodeposition and characterization of manganese coatings[J]. Journal of the Electrochemical Society, 2002, 149(4): C209–C217.CrossRefGoogle Scholar
GUILMEAU E, FUNAHASHI R, MIKAMI M, et al. Thermoelectric properties-Texture relationship in highly oriented Ca3Co4O9 composites[J]. Applied Physics Letters, 2004, 85(9): 1490–1492.CrossRefGoogle Scholar
SCARDI P, LEONI M, D’INCAU M. X-ray analysis of texture domains in nonhomogeneous thin films deposited by physical vapour deposition[J]. Thin Solid Films, 2004, 467: 326–333.CrossRefGoogle Scholar
LI Jiang-yu. The effective electroelastic moduli of textured piezoelectric polycrystalline aggregates[J]. Journal of the Mechanics and Physics of Solids, 2000, 48: 529–555.CrossRefGoogle Scholar