Journal of Failure Analysis and Prevention

, Volume 12, Issue 6, pp 660–669 | Cite as

Chemical Failure Mode Addition to the Failure Mode Taxonomy

Technical Article---Peer-Reviewed
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Abstract

The research objective of this article is to fortify the failure mode taxonomy by including chemical failures. This inclusion would enable comprehensive risk analysis in technology-based products. As technology improves at an exponential rate, partially owing to chemical advances in the semiconductor industry, failure identification tools must keep up with the pace. While the current version of the failure mode taxonomy does consider multiple domains of failure, it does not include a comprehensive collection of chemical failures. Therefore this taxonomy is insufficient for a large number of new products. The research presented here includes identifying chemical failures from publications in the semiconductor industry. These failures were then analyzed to determine the rudimentary failure modes in each case. Finally the newly identified failure modes were added to the failure mode taxonomy. A case study is presented to demonstrate using the updated failure mode taxonomy to identify both potential failures and product risks.

Keywords

Failure analysis Failure mode Taxonomy Chemical Lithography 
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Copyright information

© ASM International 2012

Authors and Affiliations

  1. 1.Missouri University of Science and TechnologyRollaUSA

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