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Journal of Thermal Spray Technology

, Volume 28, Issue 8, pp 1983–1994 | Cite as

Microstructure and Magnetron Sputtering Properties of Molybdenum Target Prepared by Low-Pressure Plasma Spraying

  • Yueming WangEmail author
  • Qiuhao Tang
  • Deqiang Chen
  • Xiubo Liu
  • Xiang Xiong
Peer Reviewed
  • 21 Downloads

Abstract

Planar molybdenum targets were fabricated by low-pressure plasma spraying (LPPS) under 2.6 × 104 Pa pressure. A lamellar structure consisting of vertical columnar grains and compact interlamellar contacts was found in the LPPS deposits. The oxygen content by mass, porosity, average grain size, microhardness, and ultimate tensile strength of the LPPS target were about 0.18%, 1.1%, 0.4 μm, 361.8 HV0.025, and 373.2 MPa, respectively. Electron backscattered diffraction (EBSD) analysis of the LPPS sample showed proportions of <001>-, <011>-, and <111>-oriented grains of about 12.0%, 16.9%, and 9.2% of the total, respectively. The molybdenum target exhibited excellent magnetron sputtering performance, since most of the grains with size less than 1.0 μm were irregularly distributed without preferred orientation. Rapid sputtering and uniform thinning on the surface of LPPS molybdenum targets took place during magnetron sputtering. Smooth and continuous molybdenum thin film with thickness of about 700 nm could be deposited by magnetron sputtering from the LPPS samples. The x-ray diffraction (XRD) spectra of molybdenum thin film with body-centered cubic structure showed that the intensity of (110) diffraction peak was much higher than that of (220) one.

Keywords

grain orientation low-pressure plasma spray magnetron sputtering mechanical properties molybdenum target thin film 

Notes

Acknowledgments

This work was supported by the Natural Science Foundation of Hunan Province (No. 2016JJ5029, 2019JJ40324), Military and Civilian Integration Industry Development Special Foundation of Hunan Province (No. 2016B116J1), Project National United Engineering Laboratory for Advanced Bearing Tribology (Henan University of Science and Technology, No. 201913), Project Hunan Province Key Laboratory of Materials Surface & Interface Science and Technology (Central South University of Forestry and Technology, No. KFBJM2019002), Project National Engineering Research Center of Near-Net-Shape Forming for Metallic Materials (South China University of Technology, No. 2016003), Project Guangdong Provincial Key Laboratory for Technology and Application of Metal Toughening (Guangdong Institute of Materials and Processing, No. GKL201610), Scientific Research Fund of the Hunan Provincial Education Department (18B408), and National Natural Science Foundation of China (No. 51875051).

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Copyright information

© ASM International 2019

Authors and Affiliations

  • Yueming Wang
    • 1
    • 2
    Email author
  • Qiuhao Tang
    • 2
  • Deqiang Chen
    • 3
  • Xiubo Liu
    • 4
  • Xiang Xiong
    • 5
  1. 1.Hunan Provincial Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Cut MaterialHunan University of Science and TechnologyXiangtanChina
  2. 2.Hunan Provincial Key Defense Laboratory of High Temperature Wear-resisting Materials and Preparation TechnologyHunan University of Science and TechnologyXiangtanChina
  3. 3.National United Engineering Laboratory for Advanced Bearing TribologyHenan University of Science and TechnologyLuoyangChina
  4. 4.Hunan Province Key Laboratory of Materials Surface & Interface Science and TechnologyCentral South University of Forestry and TechnologyChangshaChina
  5. 5.State Key Laboratory of Powder MetallurgyCentral South UniversityChangshaChina

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