Effect of Ni Content on Double-Target Co-sputtered CrNiN Coatings

  • Shuyong TanEmail author
  • Xuhai Zhang
  • Rui Zhen
  • Zhangzhong Wang


Double-target co-sputtered CrNiN coatings were deposited by DC-pulsed magnetron reactive sputtering. The nickel content increases from 0.7 to 5.0 at.% with the increased Ni target current from 0.10 to 0.40 A. The influence of Ni content on preferred orientation and properties of CrNiN coatings was investigated. The results show that the doped Ni enters CrN to form (Cr,Ni)N solid solution. CrNiN coatings are mainly composed of CrN phase and demonstrate CrN(111) preferred orientation. All the coatings present columnar growth pattern. And the less obvious the preferred orientation, the more intense competitive growth, the less sufficient the columnar growth, the finer the columnar crystal and the denser the microstructure. In spite of the most dense structure with finest grains, the hardness of CrNiN coating containing 0.7 at.% Ni is the lowest. The hardness is affected by multiple effects of preferred orientation, grain size, solid solution strengthening, morphology and stress, especially the intensity degree of preferred orientation.


CrNiN coatings double-target co-sputtering hardness preferred orientation 



This project is supported by the National Natural Science Foundation of China (Grant Nos. 51301087, 51201033), the Opening Project of Jiangsu Key Laboratory of Advanced Structural Materials and Application Technology (Grant No. ASMA201708), the Innovative Foundation Project of Nanjing Institute of Technology (Grant No. CKJB201701).


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Copyright information

© ASM International 2019

Authors and Affiliations

  • Shuyong Tan
    • 1
    • 2
    Email author
  • Xuhai Zhang
    • 3
  • Rui Zhen
    • 1
    • 2
  • Zhangzhong Wang
    • 1
    • 2
  1. 1.School of Materials Science and EngineeringNanjing Institute of TechnologyNanjingChina
  2. 2.Jiangsu Key Laboratory of Advanced Structural Materials and Application TechnologyNanjingChina
  3. 3.School of Material Science and EngineeringSoutheast UniversityNanjingChina

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