Enhanced Mechanical Properties of Li2O-Al2O3-SiO2 Photostructurable Glass by SrO Doping
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Li2O-Al2O3-SiO2 (LAS) photostructurable glasses (PSGs) are promising substrate materials with excellent three-dimensional shaping control. In this study, we prepared SrO-doped LAS-PSGs with different SrO content. The effect of SrO content on the dielectric and mechanical properties of the LAS-PSGs was investigated by deconvoluting (four-component) their Raman bands. The LAS-PSG sample with 1 wt% SrO exhibited enhanced mechanical properties: the enhanced surface micro-hardness of 568.20 HV, and the improved flexural strength of 157.23 MPa while maintaining a low dielectric loss of 4.1 × 10−3. These improvements of mechanical properties can be attributed to the increased relative fraction of Q3 units (Qn: n bridging oxygen bonds in a [SiO4] tetrahedral unit) in this sample. This is due to Q3 units being able to enhance the network structure of LAS-PSGs with little effect on [SiO4] tetrahedral units connections.
KeywordsThree-dimensional integrated packaging glass interposer mechanical properties dielectric properties
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The authors gratefully acknowledge the support of the Innovation Foundation of Collaboration Innovation Centre of Electronic Materials and Devices (ICEM2015-4002) and the China Postdoctoral Science Foundation (NO. 2018M633343).
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