Fabrication of Al/AlOx/Al Josephson junctions on silicon and sapphire substrates using a cold-development technique

  • Wei Chen
  • JiaZheng Pan
  • ZuYu Xu
  • YangYang Lv
  • XianJing Zhou
  • XueCou TuEmail author
  • Jun Li
  • GuoZhu Sun
  • HuaBing WangEmail author


In order to obtain high-quality superconducting qubits, we employed a cold-development technique, using temperatures down to −20°C, to fabricate Al/AlOx/Al Josephson junctions. Cold development greatly reduced the sensitivity of the electron-beam resist to the developer, eliminated molecules of the electron-beam resist at trench edges, and improved the repeatability and reliability of the nanopatterning process. The fabricated samples have well-defined geometries and increased dose margins, with lateral sizes of 100 nm×100 nm on both silicon and sapphire substrates. Together with the bridge-free fabrication method we used in these experiments, we believe that the cold-development technique can play an important role in quantum information technology that employs superconducting qubits.


Josephson junction cold development electron-beam lithography insulating substrates 


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Copyright information

© Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Wei Chen
    • 1
  • JiaZheng Pan
    • 1
  • ZuYu Xu
    • 1
  • YangYang Lv
    • 1
  • XianJing Zhou
    • 1
  • XueCou Tu
    • 1
    Email author
  • Jun Li
    • 1
  • GuoZhu Sun
    • 1
  • HuaBing Wang
    • 1
    Email author
  1. 1.Research Institute of Superconductor Electronics (RISE)Nanjing UniversityNanjingChina

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