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Experimental Mechanics

, Volume 59, Issue 5, pp 703–712 | Cite as

Channel Cracking and Interfacial Delamination of Indium Tin Oxide (ITO) Nano-Sized Films on Polyethylene Terephthalate (PET) Substrates: Experiments and Modeling

  • S. Ziaei
  • Q. Wu
  • J. Fitch
  • M. Elbadry
  • M. A. ZikryEmail author
Sp. Iss. Prof Ravichandran’s 60th Birthday Symposium
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Abstract

Our research objective was to obtain a fundamental understanding of how ITO thin films layered on flexible polyethylene terephthalate (PET) substrates fail due to tensile, shear, and bending loading conditions. In our approach, we employed a nonlinear finite-element (FE) approach coupled with dislocation-density crystalline and hypoelastic material models and fracture approaches tailored for channel (film) cracking and interfacial delamination. These predictions were validated with mechanical experiments and characterization at different physical scales. Failure to strain and fracture predictions were used to account for interrelated mechanisms, such as channel and interfacial cracking nucleation and propagation along cleavage planes, interfaces, and within layers. Our predictions indicate that interfacial delamination occurred when channel cracks transitioned to interfacial cracks at the ITO/PET interface for tensile loading conditions. Furthermore, the thin film system, when subjected to three-point bending and shear loading conditions was more resistant to failure in comparison to systems subjected to tensile loading conditions.

Keywords

Thin film failure Indium tin oxide Delamination Nanosized 

Notes

Acknowledgements

We gratefully acknowledge financial support from Eastman Chemical Company and the discussions with T. Smart, J. Dougherty, J. Li, and T. Floyd from Eastman Chemical Company on thin films are gratefully acknowledged; those discussions spurred our research in new directions. This work was performed in part at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-1542015). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI).

References

  1. 1.
    Jeng Y, Tsai P, Fang T (2003) Nanomeasurement and fractal analysis of PZT ferroelectric thin films by atomic force microscopy. Microelectron Eng 65:406–415.  https://doi.org/10.1016/S0167-9317(03)00052-2 CrossRefGoogle Scholar
  2. 2.
    Kim HJ, Base JW, Kim JS, Kim KS, Jang YC, Yeom GY, Lee NE (2000) Properties of amorphous tin-doped indium oxide thin films deposited by O2/Ar mixture ion beam-assisted system at room temperature. Surf Coat Technol 131:201CrossRefGoogle Scholar
  3. 3.
    Shanthraj P, Zikry MA (2011) Dislocation density evolution and interactions In crystalline materials. Acta Mater 59:7695CrossRefGoogle Scholar
  4. 4.
    Sohn MH, Kim D, Kim SJ, Paik NW, Gupta S (2003) Super-smooth indium–tin oxide thin films by negative sputter ion beam technology. J Vac Sci Technol A 21:1347–1350.  https://doi.org/10.1116/1.1577127 CrossRefGoogle Scholar
  5. 5.
    Fan JCC, Goodenough JB (1977) X-ray photoemission spectroscopy studies of Sn-doped indium-oxide films. J Appl Phys 48:3524CrossRefGoogle Scholar
  6. 6.
    Major S, Kumar S, Bhatangar M, Chopra KL (1986) Effect of hydrogen plasma treatment on transparent conducting oxides. Appl Phys Lett 49:394CrossRefGoogle Scholar
  7. 7.
    Malik A, Seco S, Furtunato E, Martins R (1998) Microcrystalline thin metal oxide films for optoelectronic applications. J Non-Cryst Solids 227–230:1092CrossRefGoogle Scholar
  8. 8.
    Adurodija FO, Izumi H, Ishihara T, Yoshioka H, Yamada K, Matsui H, Motoyama M (1999) Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition. Thin Solid Films 350:79CrossRefGoogle Scholar
  9. 9.
    Banerjee R, Ray S, Basu N, Batabyal AK, Barua AK (1987) Properties of tin doped indium oxide thin films prepared by magnetron sputtering. J Appl Phys 62:912CrossRefGoogle Scholar
  10. 10.
    Maruyama T, Fukui K (1991) Indium tin oxide thin films prepared by chemical vapour deposition. Thin Solid Films 203:297CrossRefGoogle Scholar
  11. 11.
    Raoufi D (2009) Morphological characterization of ITO thin films surfaces. Appl Surf Sci 255:3682–3686.  https://doi.org/10.1016/j.apsusc.2008.10.020 CrossRefGoogle Scholar
  12. 12.
    Scott JC, Kaufman JH, Brock PJ, DiPietro R, Salem J, Goitia JA (1996) Degradation and failure of MEH-PPV light-emitting diodes. J Appl Phys 79:2745CrossRefGoogle Scholar
  13. 13.
    Tak Y, Kim K, Park H, Lee K, Lee J (2002) Criteria for ITO (indium–tin-oxide) thin film as the bottom electrode of an organic light emitting diode. Thin Solid Films 411:12–16.  https://doi.org/10.1016/S0040-6090(02)00165-7 CrossRefGoogle Scholar
  14. 14.
    Burrows PE, Bulovic V, Forrest SR, Sapochak LS, McCarty DM, Thompson ME (1994) Reliability and degradation of organic light emitting devices. Appl Phys Lett 65:2922CrossRefGoogle Scholar
  15. 15.
    Castro-Rodríguez R, Oliva AI, Sosa V, Caballero-Briones F, Peña JL (2000) Effect of indium tin oxide substrate roughness on the morphology, structural and optical properties of CdS thin films. Appl Surf Sci 161:340–346.  https://doi.org/10.1016/S0169-4332(99)00574-7 CrossRefGoogle Scholar
  16. 16.
    Parker ID (1994) Carrier tunneling and device characteristics in polymer light-emitting diodes. J Appl Phys 75:1656CrossRefGoogle Scholar
  17. 17.
    Jonda C, Mayer ABR, Stolz U, Elschner A, Karbach A (2000) Surface roughness effects and their influence on the degradation of organic light emitting devices. J Mater Sci 35:5645–5651.  https://doi.org/10.1023/A:1004842004640 CrossRefGoogle Scholar
  18. 18.
    Raoufi D (2010) Fractal analyses of ITO thin films: A study based on power spectral density. Phys B Condens Matter 405:451–455.  https://doi.org/10.1016/j.physb.2009.09.005 CrossRefGoogle Scholar
  19. 19.
    Raoufi D, Kiasatpour A, Fallah HR, Rozatian ASH (2007) Surface characterization and microstructure of ITO thin films at different annealing temperatures. Appl Surf Sci 253:9085–9090.  https://doi.org/10.1016/j.apsusc.2007.05.032 CrossRefGoogle Scholar
  20. 20.
    Wu CC, Sturm JC, Register RA, Thompson ME (1996) Integrated three-color organic light-emitting devices. Appl Phys Lett 69:3117CrossRefGoogle Scholar
  21. 21.
    Buchanan M, Webb JB, Williams DF (1980) Preparation of conducting and transparent thin films of tin-doped indium oxide by magnetron sputtering. Appl Phys Lett 37:213CrossRefGoogle Scholar
  22. 22.
    Burroughes JH, Bradley DDC, Brown AR, Marks RN, Mackay K, Friend RH, Burns PL, Holmes AB (1990) Light-emitting diodes based on conjugated polymers. Nature (London) 347:539CrossRefGoogle Scholar
  23. 23.
    Coutal C, Azema A, Roustan J (1996) Fabrication and characterization of ITO thin films deposited by excimer laser evaporation. Thin Solid Films 288:248CrossRefGoogle Scholar
  24. 24.
    Kawai Y, Konishi N, Watanabe J, Ohmi T (1994) Ultra-low-temperature growth of high-integrity gate oxide films by low-energy ion-assisted oxidation. Appl Phys Lett 64:2223CrossRefGoogle Scholar
  25. 25.
    Kido J, Kohda M, Okuyama K, Nagai K (1992) Organic electroluminescent devices based on molecularly doped polymers. Appl Phys Lett 61:761CrossRefGoogle Scholar
  26. 26.
    Kim H, Gilmore CM (1999) Electrical, optical, and structural properties of indium-tin-oxide thin films for organic light-emitting devices. J Appl Phys 86:6451CrossRefGoogle Scholar
  27. 27.
    Kido J, Iizumi Y (1998) Fabrication of highly efficient organic electroluminescent devices. Appl Phys Lett 73:2721CrossRefGoogle Scholar
  28. 28.
    Kim H, Piqué A, Horwitz JS, Mattoussi H, Murata H, Kafafi ZH, Chrisey DB (1999) Indium tin oxide thin films for organic light-emitting devices. Appl Phys Lett 74:3444–3446.  https://doi.org/10.1063/1.124122 CrossRefGoogle Scholar
  29. 29.
    Matsuo J, Katsumata H, Minami E, Yamada I (2000) O2O2 cluster ion assisted deposition for tin doped indium oxide (ITO) films. Nucl Inst Methods Phys Res B 161-163:952CrossRefGoogle Scholar
  30. 30.
    Tang CW, Van Slyke SA (1987) Organic electroluminescent diodes. Appl Phys Lett 51:913CrossRefGoogle Scholar
  31. 31.
    Van Slyke SA, Chen CH, Tang CW (1996) Organic electroluminescent devices with improved stability. Appl Phys Lett 69:2160CrossRefGoogle Scholar
  32. 32.
    Vasu V, Subrahmanyam A (1990) Reaction kinetics of the formation of indium tin oxide films grown by spray pyrolysis. Thin Solid Films 193/194:696CrossRefGoogle Scholar
  33. 33.
    Wu CC, Wu CI, Sturm JC, Kahn A (1997) Surface modification of indium tin oxide by plasma treatment: An effective method to improve the efficiency, brightness, and reliability of organic light emitting devices. Appl Phys Lett 70:1348–1350.  https://doi.org/10.1063/1.118575 CrossRefGoogle Scholar
  34. 34.
    Wu Q, Zikry MA (2014) Microstructural modeling of crack nucleation and propagation in high strength martensitic steels. Int J Solids Struct 51:4345–4356.  https://doi.org/10.1016/j.ijsolstr.2014.08.021 CrossRefGoogle Scholar
  35. 35.
    Wu W, Chiou B, Hsieh S (1994) Effect of sputtering power on the structural and optical properties of RF magnetron sputtered ITO films. Semicond Sci Technol 9:1242CrossRefGoogle Scholar
  36. 36.
    Moss TS (1964) The interpretation of the properties of indium antimonide. Proc Phys Soc London, Sect B 67:775CrossRefGoogle Scholar
  37. 37.
    Nath P, Bunshah RF, Basol BM, Staffsud OM (1980) Electrical and optical properties of In2O3: Sn films prepared by activated reactive evaporation. Thin Solid Films 72:463CrossRefGoogle Scholar
  38. 38.
    Johnson GE, McGrane KM, Stolka M (1995) Electroluminescence from single layer molecularly doped polymer films. Pure Appl Chem 67:175CrossRefGoogle Scholar
  39. 39.
    Kiskinova M, Rangelov G, Surnev L (1986) Coadsorption of oxygen and cesium on Ru(001). Surf Sci 172:57CrossRefGoogle Scholar
  40. 40.
    Sheats JR, Antoniadis H, Hueschen M, Leonard W, Miller J, Moon R, Roitman D, Stocking A (1996) Organic Electroluminescent Devices. Science 273:884CrossRefGoogle Scholar
  41. 41.
    Zardetto V, Brown TM, Reale A, Di Carlo A (2011) Substrates for flexible electronics: A practical investigation on the electrical, film flexibility, optical, temperature, and solvent resistance properties. J Polym Sci B Polym Phys 49(9):638CrossRefGoogle Scholar
  42. 42.
    Peng C, Jia Z, Neilson H, Li T, Lou J (2013) In Situ Electro-Mechanical Experiments and Mechanics Modeling of Fracture in Indium Tin Oxide-Based Multilayer Electrodes. Adv Eng Mats 15(4):250CrossRefGoogle Scholar
  43. 43.
    Chen Z, Cotterell B, Wang W (2002) The fracture of brittle thin films on compliant substrates in flexible displays. Eng Fract Mech 69(5):597CrossRefGoogle Scholar

Copyright information

© Society for Experimental Mechanics 2019

Authors and Affiliations

  • S. Ziaei
    • 1
  • Q. Wu
    • 1
  • J. Fitch
    • 1
  • M. Elbadry
    • 1
  • M. A. Zikry
    • 1
    Email author
  1. 1.Department of Mechanical and Aerospace EngineeringNorth Carolina State UniversityRaleighUSA

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