Russian Physics Journal

, Volume 61, Issue 6, pp 1153–1159 | Cite as

Characteristics of Hydrogen Sensors Based on Thin Tin Dioxide Films Modified with Platinum, Palladium, Silver, and Yttrium

  • A. V. AlmaevEmail author
  • V. I. Gaman

The dependence of the characteristics of hydrogen sensors based on thin Pt/Pd/SnO2:Sb, Ag, Y and Ag/SnO2:Sb, Ag, Y films obtained by the method of magnetron sputtering at a direct current on the humidity level of the gas mixture during operation in thermal cyclic mode is investigated. The analysis of the experimental data was carried out using the expressions obtained on the basis of the dissociative adsorption model of hydrogen and water molecules on the SnO2 surface, taking into account the presence of three types of adsorbed particles: O, OH, OН. The use of complex modifiers Pt/Pd, Ag on the surface and Ag + Y in the bulk of tin dioxide films allows to reduce the influence of humidity on the characteristics of sensors. The role of these modifying additives in the process of dissociative adsorption of hydrogen molecules on the surface of SnO2 films in humid environment is established.


tin dioxide hydrogen thermal cyclic mode energy band bending modifiers absolute humidity 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    A. V. Almaev and V. I. Gaman, Russ. Phys. J., 60, No. 7, 1081–1087 (2017).CrossRefGoogle Scholar
  2. 2.
    E. Yu. Sevast’yanov, N. K. Maksimova, V. A. Novikov, et al., Semiconductors+, 46, No. 6, 801–809 (2012).ADSCrossRefGoogle Scholar
  3. 3.
    V. Gaman, N. Maksimova, A. Almaev, et al., Key Eng. Mater., 683, 353–357 (2016).CrossRefGoogle Scholar
  4. 4.
    V. I. Gaman, E. Yu. Sevast’yanov, N. K. Maksimova, et al., Russ. Phys. J., 56, No. 12, 1427–1434 (2014).CrossRefGoogle Scholar
  5. 5.
    V. I. Gaman and A. V. Almaev, Russ. Phys. J., 60, No. 1, 90–100 (2017).CrossRefGoogle Scholar
  6. 6.
    International Standard, Reference number ISO 18453, 2004(E).Google Scholar

Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.National Research Tomsk State UniversityTomskRussia

Personalised recommendations