Advertisement

Preparation, characterization, and application of dendritic silica-supported samarium-doped ceria nanoparticles in ultra-precision polishing for silica films

  • Yang Chen
  • Wenjie Cai
  • Wanying Wang
  • Ailian ChenEmail author
Research Paper
  • 47 Downloads

Abstract

The aim of the present study is to investigate the structure optimization of ceria-based composite particle abrasives for improved chemical mechanical polishing (CMP) performance. The core/shell-structured composite particles, comprising dendritic-like mesoporous silica (D-mSiO2) internal cores and grafted Ce1 − xSmxO2 (x = 0, 0.2) solid solutions, were prepared via a facile aqueous solution-based co-precipitation approach. The morphologies, chemical compositions, and crystalline structures of the as-formed samples were characterized by powder X-ray diffraction, high-resolution transmission electron microscopy, field-emission scanning electron microscopy, X-ray photoelectron spectroscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The silicon oxide wafers before and after CMP were examined in terms of atomic force microscopy and 3D noncontact interferometric microscopy for the information on surface quality and roughness, sectional profile, and material removal rate. The developed ceria-based abrasives presented significantly improved polishing performance toward silica by comparison with commercial ceria abrasives. The D-mSiO2 cores were expected to reduce surface roughness and eliminate surface scratch, and the samarium doping into the coated ceria nanoparticles contributed to the improvement of removal efficiency. The present results provide a facile strategy toward the design and synthesis of novel ceria-based abrasives with potential applications in achieving high-efficiency and damage-free finishing.

Keywords

Sm-doped ceria Mesoporous silica Particle abrasive Nanoscale asperities Ultra-precision polishing 

Notes

Funding information

The project is supported by the National Natural Science Foundation of China (Grant Nos. 51405038, 51575058, 51875052) and the Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD).

Compliance with ethical standards

Conflict of interest

The authors declare that they have no conflict of interest.

References

  1. Anjaneya KC, Nayaka GP, Manjanna J, Govindaraj G, Ganesha KN (2013) Studies on structural, morphological and electrical properties of Ce0.8Ln0.2O2 (Ln = Y3+, Gd3+, Sm3+, Nd3+ and La3+) solid solutions prepared by citrate complexation method. J Alloys Compd 585:594–601CrossRefGoogle Scholar
  2. Artini C, Pani M, Carnasciali MM, Buscaglia MT, Plaisier JR, Costa GA (2015) Structural features of Sm- and Gd-doped ceria studied by synchrotron X-ray diffraction and μ-Raman spectroscopy. Inorg Chem 54:4126–4137CrossRefGoogle Scholar
  3. Artini C, Pani M, Carnasciali MM, Plaisier JR, Costa GA (2016) Lu-, Sm-, and Gd-doped ceria: a comparative approach to their structural properties. Inorg Chem 55:10567–10579CrossRefGoogle Scholar
  4. Bararia B, Omranib E, Moghadamb AD, Menezesc PL, Pillaia KM, Rohatgiba PK (2016) Mechanical, physical and tribological characterization of nano-cellulose fibers reinforced bio-epoxy composites: an attempt to fabricate and scale the ‘Green’ composite. Carbohyd Polym 147:282–293CrossRefGoogle Scholar
  5. Bhatta UM, Reid D, Sakthivel T, Sayle TXT, Sayle D, Molinari M, Parker SC, Ross IM, Seal S, Möbus G (2013) Morphology and surface analysis of pure and doped cuboidal ceria nanoparticles. J Phys Chem C 117:24561–24569CrossRefGoogle Scholar
  6. Biswas RK, Khan P, Mukherjee S, Mukhopadhyay AK, Ghosh J, Muraleedharan K (2018) Study of short range structure of amorphous silica from PDF using Ag radiation in laboratory XRD system, RAMAN and NEXAFS. J Non-Cryst Solids 488:1–9CrossRefGoogle Scholar
  7. Burroughs P, Hamnett A, Orchard AF, Thornton G (1976) Satellite structure in the X-ray photoelectron spectra of some binary and mixed oxides of lanthanum and cerium. J Chem Soc Dalton Trans 1686-1698Google Scholar
  8. Chen Y, Lu J (2012) Facile fabrication of porous hollow CeO2 microspheres using polystyrene spheres as templates. J Porous Mat 19:289–294CrossRefGoogle Scholar
  9. Chen Y, Qin JW, Wang YY, Li ZF (2015) Core/shell composites with polystyrene cores and meso-silica shells as abrasives for improved chemical mechanical polishing behavior. J Nanopart Res 17:363CrossRefGoogle Scholar
  10. Chen A, Long J, Li Z, Chen Y (2018a) Dependency of structural change and polishing efficiency of mesosilica/ceria core/shell composite abrasives on calcination temperatures. J Mater Sci: Mater EL 29:11466–11477Google Scholar
  11. Chen Y, Zuo C, Li Z, Chen A (2018b) Design of ceria grafted mesoporous silica composite particles for high-efficiency and damage-free oxide chemical mechanical polishing. J Alloys Compd 736:276–288CrossRefGoogle Scholar
  12. Chong WWF, Ng JH (2016) An atomic-scale approach for biodiesel boundary lubricity characterization. Int Biodeter Biodegr 113:34–43CrossRefGoogle Scholar
  13. Cook LM (1990) Chemical processes in glass polishing. J Non-Cryst Solids 120:152–171CrossRefGoogle Scholar
  14. Gilliss SR, Bentley J, Carter CB (2004) Nanochemistry of ceria abrasive particles. Mater Res Soc 818:9–14CrossRefGoogle Scholar
  15. Guo M, Lu J, Wu Y, Wang Y, Luo M (2011) UV and visible Raman studies of oxygen vacancies in rare-earth-doped ceria. Langmuir 27:3872–3877CrossRefGoogle Scholar
  16. Janoš P, Ederer J, Pilařová V, Henych J, Tolasz J, Milde D, Opletal T (2016) Chemical mechanical glass polishing with cerium oxide: effect of selected physico-chemical characteristics on polishing efficiency. Wear 362-363:114–120CrossRefGoogle Scholar
  17. Kim T, Chung P, Lin VS (2010) Facile synthesis of monodisperse spherical MCM-48 mesoporous silica nanoparticles with controlled particle size. Chem Mater 22:5093–5104CrossRefGoogle Scholar
  18. Korsvik C, Patil S, Seal S, Self WT (2007) Superoxide dismutase mimetic properties exhibited by vacancy engineered ceria nanoparticles. Chem Commun 10:1056–1058CrossRefGoogle Scholar
  19. Lin Y, Wu Z, Wen J, Poeppelmeier KR, Marks LD (2014) Imaging the atomic surface structures of CeO2 nanoparticles. Nano Lett 14:191–196CrossRefGoogle Scholar
  20. Liu B, Liu J, Li T, Zhao Z, Gong X, Chen Y, Duan A, Jiang G, Wei Y (2015) Interfacial effects of CeO2-supported Pd nanorod in catalytic CO oxidation: a theoretical study. J Phys Chem C 119:12923–12934CrossRefGoogle Scholar
  21. Mai H, Sun L, Zhang Y, Si R, Feng W, Zhang H, Liu H, Yan C (2005) Shape-selective synthesis and oxygen storage behavior of ceria nanopolyhedra, nanorods, and nanocubes. J Phys Chem B 109:24380–24385CrossRefGoogle Scholar
  22. Naowanon W, Chueachot R, Klinsrisuk S, Amnuaypanich S (2018) Biphasic synthesis of amine-functionalized mesoporous silica nanospheres (MSN-NH2) and its application for removal of ferrous (Fe2+) and copper (Cu2+) ions. Powder Technol 323:548–557CrossRefGoogle Scholar
  23. Niwa Y, Aika K (1996) The effect of lanthanide oxides as a support for ruthenium catalysts in ammonia synthesis. J Catal 162:138–142CrossRefGoogle Scholar
  24. Nobuki O, Muneyuki I, Miho N, Kubo M (2012) Polishing process simulation of SiO2 by CeO2 abrasive grain under wet environment. Hyomen Kagaku 33:351–356CrossRefGoogle Scholar
  25. Oh M, Nho J, Cho S, Lee J, Singh RK (2011) Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP. Powder Technol 206:239–245CrossRefGoogle Scholar
  26. Polychronopoulos K, Zedan AF, Katsiotis MS, Baker MA, AlKhoori AA, AlQaradawi SY, Hinder SJ, AlHassan S (2017) Rapid microwave assisted sol-gel synthesis of CeO2 and CexSm1−xO2 nanoparticle catalysts for CO oxidation. J Mol Catal A-Chem 428:41–55CrossRefGoogle Scholar
  27. Portier J, Poizot P, Campet G, Subramanian MA, Tarascon JM (2003) Acid-base behavior of oxides and their electronic structure. Solid State Sci 5:695–699CrossRefGoogle Scholar
  28. Praveen BVS, Cho B, Park J, Ramanathan S (2015) Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation. Mat Sci Semicon Proc 33:161–168CrossRefGoogle Scholar
  29. Riegraf M, Hoerlein MP, Costa R, Schiller G, Friedrich KA (2017) Sulfur poisoning of electrochemical reformate conversion on nickel/gadolinium-doped ceria electrodes. ACS Catal 7:7760–7771CrossRefGoogle Scholar
  30. Sebastian A, Zhang F, Dodda A, May-Rawding D, Liu H, Zhang T, Terrones M, Das S (2019) Electrochemical polishing of two-dimensional materials. ACS Nano 13:78–86CrossRefGoogle Scholar
  31. Singhania A (2017) High surface area M (M = La, Pr, Nd, and Pm)-doped ceria nanoparticles: synthesis, characterization, and activity comparison for CO oxidation. Ind Eng Chem Res 56:13594–13601CrossRefGoogle Scholar
  32. Sreeremya TS, Prabhakaran M, Ghosh S (2015) Tailoring the surface properties of cerium oxide nanoabrasives through morphology control for glass CMP. RSC Adv 5:84056–84065CrossRefGoogle Scholar
  33. Sutradhar N, Sinhamahapatra A, Pahari S, Jayachandran M, Subramanian B, Bajaj HC, Panda AB (2011) Facile low-temperature synthesis of ceria and samarium-doped ceria nanoparticles and catalytic allylic oxidation of cyclohexene. J Phys Chem C 115:7628–7637CrossRefGoogle Scholar
  34. Thorat AV, Ghoshal T, Carolan P, Holmes JD, Morris MA (2014) Defect chemistry and vacancy concentration of luminescent europium doped ceria nanoparticles by the solvothermal method. J Phys Chem C 118:10700–10710CrossRefGoogle Scholar
  35. Trovarelli A, Llorca J (2017) Ceria catalysts at nanoscale: how do crystal shapes shape catalysis? ACS Catal 7:4716–4735CrossRefGoogle Scholar
  36. Wu L, Dholabhai PP, Uberuaga BP, Castro RHR (2017) Temperature dependence discontinuity in the stability of manganese-doped ceria nanocrystals. Cryst Growth Des 17:446–453CrossRefGoogle Scholar
  37. Zhang L, Meng J, Yao F, Zhang W, Liu X, Meng J, Zhang H (2018) Insight into the mechanism of the ionic conductivity for Ln-doped ceria (Ln = La, Pr, Nd, Pm, Sm, Gd, Tb, Dy, Ho, Er, and Tm) through first-principles calculation. Inorg Chem 57:12690–12696CrossRefGoogle Scholar
  38. Zhao Y, Teng B, Wen X, Zhao Y, Chen Q, Zhao L, Luo M (2012) Superoxide and peroxide species on CeO2(111), and their oxidation roles. J Phys Chem C 116:15986–15991CrossRefGoogle Scholar
  39. Zhao D, Shen D, Yang J, Li X, Zhou L, Zhang R, Li W, Chen L, Wang R, Zhang F (2014) Biphase stratification approach to three-dimensional dendritic biodegradable mesoporous silica nanospheres. Nano Lett 14:923–932CrossRefGoogle Scholar
  40. Zheng X, Xu S, Wang Y, Sun X, Gao Y, Gao B (2018) Enhanced degradation of ciprofloxacin by graphitized mesoporous carbon (GMC)-TiO2 nanocomposite: strong synergy of adsorption-photocatalysis and antibiotics degradation mechanism. J Colloid Interf Sci 527:202–213CrossRefGoogle Scholar

Copyright information

© Springer Nature B.V. 2019

Authors and Affiliations

  • Yang Chen
    • 1
  • Wenjie Cai
    • 1
  • Wanying Wang
    • 1
  • Ailian Chen
    • 2
    • 3
    Email author
  1. 1.School of Materials Science and EngineeringChangzhou UniversityChangzhouPeople’s Republic of China
  2. 2.School of Mechanical EngineeringChangzhou UniversityChangzhouPeople’s Republic of China
  3. 3.Jiangsu Key Laboratory of Green Process EquipmentChangzhou UniversityChangzhouPeople’s Republic of China

Personalised recommendations