Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

  • Yingshan ZhangEmail author
  • Jianshe Liu
  • Changhao Zhao
  • Rutian Huang
  • Wei Chen
Original Paper


Superconducting coplanar waveguide resonators and Josephson junctions are crucial components of superconducting quantum information processing chips. Resonators are usually fabricated through lift-off or etching, while Josephson junctions are made by trilayer process or double-angle evaporation. To simplify the fabrication process, we propose a scheme that uses the same process steps for both Josephson junctions and resonators. Simulations and experiments are conducted to confirm that resonators fabricated via the proposed process have quality factor comparable to those via traditional process. This work paves the way for quantum information processing on superconducting large-scale integrated circuits.


Superconducting coplanar waveguide Resonator Quality factor Trilayer process Quantum information processing 



The authors thank professor Lian-fu Wei and my colleague Han Cai for comments that greatly improved the manuscript.


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Authors and Affiliations

  1. 1.Department of Microelectronics and NanoelectronicsTsinghua UniversityBeijingChina
  2. 2.Institute of MicroelectronicsTsinghua UniversityBeijingChina

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