Microfabrication Developments for Future Instruments Using KID Detectors
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The NIKA2 instrument, operating at the IRAM 30-m telescope, demonstrates that the aluminum LEKID technology is a state-of-the-art solution for detectors dedicated to millimeter-wave astronomy. Following this path, several instrumental projects envisage today the use of LEKID technology. To cover the full 60–600 GHz band, relevant for CMB-oriented experiments, we are exploring new materials and solutions and we present our latest results. We present a new technology from NIKA2 developments to address the band 450–650 GHz. And we expose our first developments of the trilayer Al/Ti/Al technology following our work for low frequencies (60–80 GHz).
KeywordsKinetic inductance detectors Millimeter wavelength Array
This work has been performed at the “Plateforme Technologique Amont” (PTA) of Grenoble, with the financial support of the FOCUS Labex, the CNES and the ANR. We acknowledge the support of the cryogenics and electronics groups of the Institute NEEL and the LPSC.
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