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Journal of Low Temperature Physics

, Volume 193, Issue 3–4, pp 349–355 | Cite as

Study of Surface Roughness Effect on Super–Normal Transition of Ti/Au Transition Edge Sensor Calorimeters

  • K. Kengo
  • Y. Ezoe
  • S. Kitazawa
  • R. Hayakawa
  • K. Nunomura
  • T. Ohashi
  • Y. Ishisaki
  • S. Yamada
  • M. Hidaka
  • T. Satoh
  • K. Mitsuda
Article
  • 54 Downloads

Abstract

We are developing transition edge sensor (TES) X-ray microcalorimeters for the future Japanese mission DIOS. It adopts microstrip readout wiring for low pixel-to-pixel crosstalk. In past samples, TES films composed of Ti and Au have not shown proper super–normal transition when it is deposited on the wiring. Assuming that surface roughness of the substrate can influence the transition, we reduced the surface roughness of the underneath layer before deposition of the TES film by using chemical mechanical polishing. We then found that the substrate becomes much smoother with a roughness of <1 nm rms and the TES film shows a proper transition.

Keywords

TES Fabrication Surface roughness Chemical mechanical polishing 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • K. Kengo
    • 1
  • Y. Ezoe
    • 1
  • S. Kitazawa
    • 1
  • R. Hayakawa
    • 1
  • K. Nunomura
    • 1
  • T. Ohashi
    • 1
  • Y. Ishisaki
    • 1
  • S. Yamada
    • 1
  • M. Hidaka
    • 2
  • T. Satoh
    • 2
  • K. Mitsuda
    • 3
  1. 1.Tokyo Metropolitan UniversityHachiojiJapan
  2. 2.The National Institute of Advanced Industrial Science and Technology (AIST)TsukubaJapan
  3. 3.3-1-1 The Institute of Space and Astronautical Science (ISAS), The Japan Aerospace Exploration Agency (JAXA)SagamiharaJapan

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