Journal of Low Temperature Physics

, Volume 193, Issue 3–4, pp 276–281 | Cite as

Twin-Slot Antenna-Coupled Superconducting Ti Transition-Edge Sensor at 350 GHz

  • W. ZhangEmail author
  • W. Miao
  • Z. Wang
  • X. H. Guo
  • D. Liu
  • J. Q. Zhong
  • Q. J. Yao
  • S. C. ShiEmail author


We have developed four-leg-supported superconducting Ti transition-edge sensors (TES) formed by KOH wet etching. Energy relaxation mechanism is changed from electron–phonon coupling to diffusive phonon after wet etching. The current–voltage curves of the same TES device were measured before and after wet etching. After wet etching, its thermal conductance (G) is reduced to 500 pW/K from 8950 pW/K. The measured effective response time (τeff) is 143 μs, about 30 times larger. In addition, we have studied the optical noise equivalent power (NEP) with a cryogenic blackbody in combination with metal-mesh filters to define the radiation bandwidth. The obtained optical NEP is 5 × 10−16 W/√Hz, which is suitable for ground-based astronomical applications.


Transition-edge sensor Thermal conductance Noise equivalent power Optical response 



This work was supported in part by National Key R&D program of China under Grant 2017YFA0304003, NSFC under Grants 11673073, 11190012, 11473075, and by the CAS Joint Key Lab for Radio Astronomy.


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© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Purple Mountain ObservatoryCASNanjingChina
  2. 2.Key Lab of Radio AstronomyCASNanjingChina

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