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Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package

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In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO4, a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO–LiClO4 with Al was completed by anodic bonding method. Secondly, the bonding mechanism of PEO–LiClO4 and Al was revealed by FT-IR and energy dispersive spectrum analysis. The results show that in a certain range, the more lithium salt content, the more Li+ number of ether oxygen coordination in the molecular chain of LiClO4 and PEO, the higher the degree of complexation; under the action of strong electrostatic field, the ion-coordination exchange of PEO–LiClO4 and Al at the bonding interface by ion diffusion is the direct reason for the two to achieve bonding.

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Foundation item: The work was financially supported by the National Natural Science Foundation of China (Grant No. 5187052685), and the Shanxi Provincial Natural Science Foundation of China (Grant No. 201801D121085).

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Correspondence to Xu Yin.

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Yin, X., Liu, C., Meng, Y. et al. Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package. J Inorg Organomet Polym (2020). https://doi.org/10.1007/s10904-020-01461-5

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  • MEMS packaging
  • Anodic bonding
  • Polymer electrolyte
  • Mechanism