Journal of Materials Science: Materials in Electronics

, Volume 30, Issue 17, pp 16548–16553 | Cite as

Microstructure, optical and dielectric properties of cerium oxide thin films prepared by pulsed laser deposition

  • G. BalakrishnanEmail author
  • Arun Kumar Panda
  • C. M. Raghavan
  • Akash Singh
  • M. N. Prabhakar
  • E. Mohandas
  • P. Kuppusami
  • Jung il Song


Cerium oxide (CeO2) thin films were deposited on Pt (111)/Ti/SiO2/Si(100) substrates using pulsed laser deposition method at different temperatures such as, 300 K, 573 K and 873 K with 3 × 10−2 mbar oxygen partial pressure. The prepared films were systematically investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), photoluminescence (PL) and electrical measurement system. XRD analysis clearly showed improved crystallinity of CeO2 films prepared at 573 and 873 K substrate temperatures. The AFM analysis indicated the uniform distribution of the nanocrystallites and dense structure with the roughness (RMS) of ~ 2.1–3.6 nm. The PL studies of the films showed a broad peak at ~ 366–368 nm, indicating the optical bandgap of 3.37–3.38 eV. The electrical property study showed minimum leakage current density of 2.0 × 10−7 A/cm2 at 873 K, which was measured at 100 kV and this value was much lower than that of the CeO2 film deposited at 300 K. The dielectric constants are increased and dielectric loss values decreased for the films with increasing substrate temperature.



One of the authors C. M. Raghavan wants to thanks Marie Skłodowska-Curie Individual Fellowship (MOFUS, # 795356).


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© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  • G. Balakrishnan
    • 1
    Email author
  • Arun Kumar Panda
    • 2
  • C. M. Raghavan
    • 3
  • Akash Singh
    • 2
  • M. N. Prabhakar
    • 4
  • E. Mohandas
    • 2
  • P. Kuppusami
    • 5
  • Jung il Song
    • 4
  1. 1.Department of PhysicsBharath Institute of Science and Technology, Bharath Institute of Higher Education and ResearchChennaiIndia
  2. 2.Materials Synthesis and Structural Characterization Division, Physical Metallurgy GroupIndira Gandhi Centre for Atomic ResearchKalpakkamIndia
  3. 3.Aston Institute of Photonic Technologies (AIPT), Aston UniversityBirminghamUK
  4. 4.Department of Mechanical EngineeringChangwon National UniversityChangwonRepublic of Korea
  5. 5.Centre of Nanoscience and Nanotechnology, Sathyabama Institute of Science and TechnologyChennaiIndia

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