Journal of Materials Science: Materials in Electronics

, Volume 29, Issue 17, pp 14679–14688 | Cite as

Acetic acid sensing of Mg-doped ZnO thin films fabricated by the sol–gel method

  • Vahid Khorramshahi
  • Javad KaramdelEmail author
  • Ramin Yousefi


Acetic acid vapor thin film gas sensor was developed by synthesizing Mg-doped ZnO nanoparticles using a low cost and facile sol–gel route and were characterized using field emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Fourier transform infrared spectroscopy and photoluminescence analysis. Morphological characterizations showed the formation of well-defined and highly crystalline ZnO nanoparticles on Si(100)/SiO2 substrate. Gas sensing characterization of dip coated Mg-doped ZnO thin films were performed in temperature range of 150–400 °C at different acetic acid vapor concentrations. At 300 °C, the sensitivity for pure ZnO, Zn0.98Mg0.02O and Zn0.94Mg0.06O samples at concentration of 200 ppm of acetic acid were 124, 78 and 67%, respectively. The highest sensitivity for Zn0.96Mg0.04O sample was 136% at the same vapor concentration and temperature. It showed a fast response time and recovery time (145 and 110 s, respectively).


Compliance with ethical standards

Conflict of interest

There are no conflicts of interest to declare.


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Authors and Affiliations

  1. 1.Department of Electrical EngineeringArak Branch, Islamic Azad UniversityArakIran
  2. 2.Department of Electrical EngineeringSouth Tehran Branch, Islamic Azad UniversityTehranIran
  3. 3.Department of PhysicsMasjed-Soleiman Branch, Islamic Azad University (I.A.U.)Masjed-SoleimanIran

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