Integral nanoindentation evaluation of TiO2, SnO2, and ZnO thin films deposited via spray-pyrolysis on glass substrates

  • Edgar A. VillegasEmail author
  • Rodrigo Parra
  • Leandro RamajoEmail author


Tin, titanium and zinc oxide thin films were deposited on glass substrates by spray-pyrolysis. According to the resolution of XRD and SEM, films are single phase and of uniform surfaces. Elastic modulus and film hardness were studied by instrumented indentation. Friction coefficient and wear volume were determined by nanowear procedures. Low friction coefficient and roughness (< 0.2 and ∼ 7 nm, respectively) were measured. Hardness values (between 6 and 11 GPa) were determined to be in agreement with those reported for similar films grown by physical methods. Titanium and tin dioxide films displayed better wear and mechanical properties than ZnO films.



Thanks are due to V. Fuchs for XRD measurements, to M. Lere for equipment upgrade and design and B. Daga at the triboindenter lab. This work was carried out with the financial support of CONICET, ANPCyT (PICT’15 2305) and University of Mar del Plata.


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© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Institute of Research in Materials Science and Technology (INTEMA), CONICET - National University of Mar del PlataMar del PlataArgentina

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