Journal of Materials Science

, Volume 54, Issue 3, pp 1958–1966 | Cite as

Deformation patterns and fracture stress of beta-phase gallium oxide single crystal obtained using compression of micro-pillars

  • Y. Q. WuEmail author
  • S. Gao
  • R. K. Kang
  • H. HuangEmail author


The deformation of single-crystal beta-phase gallium oxide (or β-Ga2O3) micro-pillars under compression was investigated with the aid of transmission electron microscopy. High-density stacking faults were the dominant deformation defects in the plastically deformed micro-pillars. Micro-cracks were found along (200), (001) and (010) lattice planes and fracture occurred along (200) lattice plane when compressive strain was sufficiently great. Lattice bending was also observed in the fractured pillar. The average fracture stress and strain of β-Ga2O3 being measured are 7.25 ± 1.11 GPa and 3.80 ± 0.57%, respectively, which have never been reported previously.



This work was financially supported by the Australia Research Council (ARC) under Discovery Project Scheme (DP180103275). SG was funded by the Youth Program of National Natural Science Foundation of China (51505063).


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Authors and Affiliations

  1. 1.School of Mechanical and Mining EngineeringThe University of QueenslandBrisbaneAustralia
  2. 2.Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of EducationDalian University of TechnologyDalianPeople’s Republic of China

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