Indentation and contact damages on grain boundary controlled silicon carbide ceramics
- 111 Downloads
Silicon carbide (SiC) ceramics have been studied with particular interest for engineering applications that require high wear resistance [1, 2, 3, 4]. The high hardness of SiC ceramics is accompanied by wear, erosion, and mechanical fatigue resistance. Considerable resistance in corrosive environments such as plasma-enhanced environments is required for hard SiC ceramics in the semiconductor industry. In these materials, mechanical contact is one of the important considerations in the lifetimes of components [5, 6]. The surfaces of the material can be subjected to contact loads ranging, from single to multiple concentrated loads. Thus, reduced sensitivity against the damages—“flaw tolerance” or “damage tolerance”—is required to prolong the lifetimes of the components in service [7, 8, 9, 10].
While SiC ceramics exhibit excellent wear resistance, the critical drawback is low reliability due to the inferior fracture toughness. Therefore, over several decades, studies have demonstrated...
KeywordsFracture Toughness Y2O3 Liquid Phase Sinter Radial Crack Sc2O3
This work was supported by the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Commerce, Industry and Energy, Republic of Korea and a grant partly from the Seoul Research and Business Development Program (Grant No. 10583).
- 2.Mulla MA, Krstic VD (1991) Am Ceram Soc Bull 70:439Google Scholar
- 3.Ashcroft W (1975) Speical ceramics 6. Academic Press, New YorkGoogle Scholar
- 8.Braun LM, Bennison SJ, Lawn BR (1992) Composites and advanced ceramic materials, vol 13. American Ceramic Society, Ohio, p 156Google Scholar
- 15.Volz E, Roosen A, Wang SC, Wei WCJ (2004) J Mater Sci 39:4095. doi: https://doi.org/10.1023/B:JMSC.0000033388.55299.dc CrossRefGoogle Scholar
- 24.Hertz H (1896) Hertz’s miscellaneous papers, chaps 5 and 6. Macmillan, London, UKGoogle Scholar
- 30.Kim JH, Lee SW, Lee KS, Kim DK (2004) J Mater Sci 39:7023. doi: https://doi.org/10.1023/B:JMSC.0000047547.09325.3d CrossRefGoogle Scholar