Journal of Materials Science

, Volume 44, Issue 2, pp 541–544 | Cite as

Phase sensitivity of Raman spectroscopy analysis of CVD titania thin films

  • Song Wei LuEmail author
  • Caroline Harris
  • Scott Walck
  • Mehran Arbab


Photocatalytic titania thin films deposited on float glass by chemical vapor deposition were analyzed by transmission electron microscopy, atomic force microscopy, Raman spectroscopy, and X-ray diffraction. Raman spectroscopy results indicate its phase sensitivity in the presence of trace amount of anatase. This suggests a preferable method of using Raman spectroscopy to characterize mixed phases of titania thin films, especially when titania coatings are deposited on other crystalline oxide materials, for example, tin oxide.


Titania Rutile Raman Spectroscopy Raman Band Anatase Phase 



The authors would like to thank Prof. Andre Sommer of Miami University for Raman spectroscopy measurement.


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Copyright information

© PPG Industries, Inc. 2008

Authors and Affiliations

  • Song Wei Lu
    • 1
    Email author
  • Caroline Harris
    • 1
  • Scott Walck
    • 1
  • Mehran Arbab
    • 1
  1. 1.Glass Technology CenterPPG Industries, Inc.CheswickUSA

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