Journal of Materials Science

, Volume 44, Issue 1, pp 300–305 | Cite as

Microstructure and mechanical properties of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering on AISI H13 steel

  • Chunyan Yu
  • Shebin Wang
  • Linhai Tian
  • Tianbao Li
  • Bingshe XuEmail author


CrAlN coatings were deposited on silicon and AISI H13 steel substrates using a modified ion beam enhanced magnetron sputtering system. At the modified ion beam bombardment, the effects of bias voltage and Al/(Cr + Al) ratio on microstructure and mechanical properties of the coatings were studied. The X-ray diffraction data showed that all CrAlN coatings were crystallized in the cubic NaCl B1 structure, showing the (111), (200), and (220) preferential orientation. It is noted that the (111) diffraction peak intensity decreased and the peaks broadened as the bias voltage increased at the same ratio of Al/Cr targets power, which is attributed to the variation in the grain size and microstrain. The microstructure observation of the coatings by field emission scanning electron microscopy cross-section morphology shows that the columnar grain became more compact and dense with increasing substrate bias voltage and Al concentration. At a substrate bias voltage of −120 V and a Al/(Cr + Al) ratio of 40%, the coating had the highest hardness (33.8 GPa) and excellent adhesion to the substrate.


Acoustic Emission Acoustic Emission Signal Scratch Test Substrate Bias Voltage Scratch Track 



This work was financially supported by the National Natural Scientific Foundation of China (No. 20471041 and 90306014).


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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Chunyan Yu
    • 1
  • Shebin Wang
    • 1
    • 2
  • Linhai Tian
    • 3
  • Tianbao Li
    • 1
    • 2
  • Bingshe Xu
    • 1
    • 2
    Email author
  1. 1.College of Materials Science and EngineeringTaiyuan University of TechnologyTaiyuanChina
  2. 2.Key Laboratory of Interface Science and Engineering in Advanced MaterialsTaiyuan University of Technology, Ministry of EducationTaiyuanChina
  3. 3.Research Institute of Surface EngineeringTaiyuan University of TechnologyTaiyuanChina

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