Journal of Materials Science

, Volume 43, Issue 9, pp 3162–3165 | Cite as

Study on dielectric and tunable properties of Cr-doped Ba0.6Sr0.4TiO3 thin films by rf sputtering

  • Mei-feng HuEmail author
  • Yue Zhuo
  • Sheng-xiang Wang
  • Yu Tian


Ba0.6Sr0.4TiO3 dielectric thin films doped by Cr(0, 1, 2.5, 5, 10 mol%) (BSTC) were prepared by radio frequency magnetron sputtering on Pt/Ti/SiO2/Si substrates. The structure and morphology of the BSTC thin films were studied by atomic force microscopy and X-ray diffraction. The effect of Cr doping on the dielectric properties of BST thin films were analyzed. The results show that the dielectric loss of Cr doping BST thin films is lower than that undoped, and the tunability increased with Cr doping. The thin film doped with 5 mol% Cr has the best dielectric properties. The tunability, loss and figure of merit (FOM) at 1 MHz were 38.9%, 0.0183, and 21.3, respectively.


Dielectric Constant Dielectric Loss Loss Tangent Radio Frequency Magnetron Ferroelectric Thin Film 


  1. 1.
    Baniecki JD, Shioga T, Kurihara K (2003) Mater Res Soc Sym Proc 748:441Google Scholar
  2. 2.
    Korn DS, Wu HD (1999) Intger Ferroelectr 24:215CrossRefGoogle Scholar
  3. 3.
    Knauss LA, Pond JM, Horwitz SJ, Chrisey DB (1996) Appl Phys Lett 69:25CrossRefGoogle Scholar
  4. 4.
    Cole MW, Joshi PC, Ervin MH, Wood MC, Pfeffer RL (2000) Thin Solid Films 34:374Google Scholar
  5. 5.
    Kawahara T, Yamamuka M, Yuuki A, Ono K (1996) Jpn J Appl Phys 35:4880CrossRefGoogle Scholar
  6. 6.
    Cole MW, Joshi PC, Ervin MH (2001) J Appl Phys 89:6336CrossRefGoogle Scholar
  7. 7.
    Yoon KH, Lee JC, Park J, Kang DH, Song CM, Seo YG (2001) Jpn J Appl Phys 40:5497CrossRefGoogle Scholar
  8. 8.
    Madeswaran S, Giridharan NV, Jayavle R, Subramania C (2002) J Cryst Growth 237–239:858CrossRefGoogle Scholar
  9. 9.
    Wangyang F, Lingzhu C, Shufang W, Zhihui S (2006) Appl Phys Lett 89:132908CrossRefGoogle Scholar
  10. 10.
    KimKT, Kim CI (2005) Thin Solid Films 472:26CrossRefGoogle Scholar
  11. 11.
    Chen SY, Wang HW, Huang LC (2001) Jpn J Appl Phys 40:4974CrossRefGoogle Scholar
  12. 12.
    Krupanidi SB, Peng CJ (1997) Thin Solid Films 305:144CrossRefGoogle Scholar
  13. 13.
    Cole MW, Hubbard C, Ngo E, Ervin M, Wood M (2002) J Appl Phys 92:475CrossRefGoogle Scholar
  14. 14.
    Diamaond H (1961) J Appl Phys 32:909CrossRefGoogle Scholar
  15. 15.
    Wang S-x, Hao J-h, Wu Z-p, Wang D-Y, Zhuo Y et al (2007) Appl Phys Lett 91:252908Google Scholar

Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Mei-feng Hu
    • 1
    Email author
  • Yue Zhuo
    • 1
  • Sheng-xiang Wang
    • 1
  • Yu Tian
    • 1
  1. 1.Department of Physics and Key Laboratory of Acoustic and Photonic Materials and Devices, Ministry of EducationWuhan UniversityWuhanPeople’s Republic of China

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