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Journal of Materials Science

, Volume 41, Issue 18, pp 5820–5827 | Cite as

Crystallization behavior of PZT film prepared by sol–gel route

  • F. Yang
  • L. Wang
  • F. Zheng
  • W. D. Fei
Article

Abstract

The X-ray scattering measurements were used to investigate Pb(Zr,Ti)O3 films prepared by sol–gel process. From analysis of specular and off-specular X-ray reflectivities, the morphology of nanoscale pores in Pb(Zr,Ti)O3 film was determined by adjusting a model to the observed data. It is found that nanoscale pores in the films were closely attributed to the precursor with higher molar concentration. Furthermore, nanoscale pores present a certain degree of order in the direction normal to the film surface, which mainly distribute near the interface between films and substrate. The pores gradually close with annealing time increasing, and the closing process of the pores leads to pit formation in the film surface.

Keywords

Gyration Radius Normal Tensile Stress Lead Acetate Trihydrate Molar Concentration Precursor Zirconium Oxynitrate 

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Copyright information

© Springer Science+Business Media, LLC 2006

Authors and Affiliations

  1. 1.School of Materials Science and EngineeringHarbin institute of TechnologyHarbinP. R. China
  2. 2.Department of Applied PhysicsHarbin Institute of TechnologyHarbinP. R. China

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