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Journal of Materials Science

, Volume 41, Issue 14, pp 4454–4465 | Cite as

Quantitative pressure and strain field analysis of helium precipitates in silicon

  • Norbert Hueging
  • Martina LuysbergEmail author
  • Helmut Trinkaus
  • Karsten Tillmann
  • Knut Urban
Article

Abstract

The structural properties of overpressurised helium precipitates formed by low dose ion implantation and subsequent annealing of silicon are investigated by quantitative transmission electron microscopy techniques. These precipitates, which show pronounced platelet geometry, are analysed with respect to their geometry, crystallographic orientation and their particular gas pressure values. The dependence of the measured platelet pressure versus the radius is discussed in terms of a Griffith crack. Experimental results on the shape and the crystallographic orientation of the platelets are discussed in the framework of anisotropic elastic properties and surface energies of silicon. The ability of the precipitates to punch-out dislocation loops is discussed in terms of associated threshold shear stress values and evaluated with regard to the defect size dependency.

Keywords

Dislocation Loop Habit Plane Silicon Matrix Griffith Crack Fringe System 

Notes

Acknowledgements

The authors cordially thank Bernd Holländer and Siegfried Mantl for the fruitful cooperation during realisation of the implantation experiments, for guidance of the SRIM calculations as well as for helpful discussions.

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Copyright information

© Springer Science+Business Media, LLC 2006

Authors and Affiliations

  • Norbert Hueging
    • 1
    • 2
    • 3
  • Martina Luysberg
    • 1
    • 2
    • 3
    Email author
  • Helmut Trinkaus
    • 1
    • 3
  • Karsten Tillmann
    • 1
    • 3
  • Knut Urban
    • 1
    • 2
    • 3
  1. 1.Institute of Solid State Research Research Centre JülichJülichGermany
  2. 2.Ernst Ruska-Centre for Microscopy and Spectroscopy with ElectronsResearch Centre JülichJülichGermany
  3. 3.Center for Nanoelectronic Systems for Information TechnologyResearch Centre JülichJülichGermany

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