Investigation of the Photothermal Excited Microcantilevers Based on Modified Couple Stress Theory
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In microscale and sub-micron scale, scale effect highlights and the classical continuum mechanics cannot describe microstructure-dependent size effects. So many non-classical theories were put forward. The modified couple stress theory was established by introducing a material parameter to characterize the scale effect. In this paper, the dynamic responses of microcantilever under photothermal excitation are studied using the modified couple stress theory. The microcantilever deflection governing equation was given, and deflections were obtained numerically using relaxation method. Comparison was made between numerical results with that obtained with experimental measurement and showed a good agreement. According to the numerical results, the scale effect becomes remarkable as the ratio of thickness to the material parameter changes from zero to one. Also, the results showed that this ratio has prominent effect on the resonant frequency of microcantilever.
KeywordsMicrocantilever vibration Modified couple stress theory Photothermal Relaxation method
The work was supported by the National Natural Science Foundation of China (Grants Nos. 11672224 and 11272243), the Fundamental Research Funds for the Central Universities and the Scientific Research Program Funded by Shaanxi Provincial Education Department (Program No. 13JS103).
- 7.F. Huber, H.P. Lang, J. Zhang, D. Rimoldi, C. Gerber, Nanosensors for cancer detection. Swiss Med. Wkly. 145, w14092 (2015)Google Scholar
- 11.J.S. Peng, W. Feng, H.Y. Lin, C.H. Hsueh, S. Lee, Measurements of residual stresses in the Parylene C film/silicon substrate using a microcantilever beam. J. Micromech. Microeng. 23, 095001 1-7 (2013)Google Scholar
- 14.A. Mandelis (ed.), Photoacoustic and Thermal Wave Phenomena in Semiconductors (Elsevier Science Publishing Company, North Holland, 1987)Google Scholar
- 18.D.M. Todorović, P.M. Nikolić, Carrier transport contribution to thermoelastic and electronic deformation in semiconductor, in Semiconductors and Electronic Materials, ed. by A. Mandelis, P. Hess (SPIE Optical Engineering Press, Belingham, 2000), pp. 273–318Google Scholar