Characteristics of Coplanar Waveguide of Small Cross Section on BCB with Coplanar Ground to Conductor-Backed Plane Interconnection
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Conductor-backed coplanar waveguide on 30-μm-thick BCB polymer is fabricated. In order to eliminate unwanted propagation modes for these lines designed for frequencies up to 1 THz, electroplated vias interconnect each coplanar ground to the backed conductor. Transmission line properties are extracted here up to 67 GHz, showing a characteristic impedance of about 50 Ω, but with high conduction losses for this frequency range due to the thin metal layer used. Thru-reflect-line correction and a de-embedding with electrical circuit of accesses are applied to extract line properties. The comparison with a coplanar waveguide model leads to a relative permittivity of 2.676 for the BCB in this low-frequency range.
KeywordsTransmission lines THz coplanar waveguides Submillimeter wave waveguides Polymer dielectric
The sample preparation is performed in the Technology Facility of the Center for Nanoscience and Nanotechnology in the French Renatech network.
This work was supported by the ANR TERAPACIPODE project, grant ANR-16-CE24-0031-01 of the French Agence Nationale de la Recherche.
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