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Glass and Ceramics

, Volume 76, Issue 3–4, pp 142–144 | Cite as

Use of Alkaline Glass in Micromechanical Sensor Structures

  • V. E. PautkinEmail author
AT ENTERPRISES AND INSTITUTES
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The use of alkali glass in micromechanical sensors, specifically, accelerometers, is shown. Alkali glass is used in the sensitive elements of the indicated devices. The main technological operation in the assembly of such sensitive elements is electrostatic bonding, also known as the anodic bonding. In this process a number of complex physical effects occur in the glass. Reliable functioning of the fabricated devices depends on the quality of the execution of the parts made of alkali glass and silicon.

Key words

alkali glass micromechanical sensor sensitive element electrostatic bonding 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Scientific-Research Institute of Physical Measurements (NIIFI)PenzaRussia

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