Biomedical Microdevices

, 20:96 | Cite as

The microfabrication of mold for polymer microfluidic devices with Zr-based metallic glass

  • Xiang ZhangEmail author
  • Haotong Li
  • Zhenxing Wang
  • Xueye Chen
  • Qian LiEmail author


Polymer microfluidic devices are used for many purposes such as microarrays and biochips. The key tool for manufacturing these chips in bulk is an appropriate mold. However, the popular material for making molds is nickel or nickel alloys, which have low stiffness and wear out easily. Zr-based metallic glass is a promising material for micro- or nanomolds because it has good mechanical properties and can be easily formed with high precision. In this paper, Zr-based metallic glass is proposed for use as micromold insert to make poly-(methyl methacrylate) (PMMA) microfluidic devices. Our experiments show that they have good feature integrity and replication quality. Microchannels we fabricated using these replicas did not leak and had good flow performance. Zr-based metallic glass can greatly ease the manufacture of plastic microfluidic devices for research and commercial applications.


Bulk metallic glass Micro mold insert Microstructure replication Polymer micro molding 



This work was financially supported by the International Science & Technology Cooperation Program of China (No.2015DFA30550), the Basic & Cutting-edge Technology Research Project of Henan Province (No.132300410102), the Henan Provincial Natural Science Foundation (No.162300410245), the Major Science and Technology Special Project of Henan Province (No.171100210600), the Foundation for University Young Key Teacher of Henan Province (No.2015GGJS-155) and the Outstanding Young Talent Research Fund of Zhengzhou University (No.1521327003).


  1. M. Agarwal, R.A. Gunasekaran, P. Coane, K. Varahramyan, Scum-free patterning of SU-8 resist for electroforming applications. J. Micromech. Microeng. 15(1), 130–135 (2005)CrossRefGoogle Scholar
  2. L. Brown, T. Koerner, J.H. Horton, R.D. Oleschuk, Fabrication and characterization of poly(methylmethacrylate) microfluidic devices bonded using surface modifications and solvents. Lab Chip 6(1), 66–73 (2006)CrossRefGoogle Scholar
  3. C.D. Chin, V. Linder, S.K. Sia, Commercialization of microfluidic point-of-care diagnostic devices. Lab Chip 12(12), 2118–2134 (2012)CrossRefGoogle Scholar
  4. D.J. Guckenberger, T.E. de Groot, A.M.D. Wan, D.J. Beebe, E.W.K. Young, Micromilling: A method for ultra-rapid prototyping of plastic microfluidic devices. Lab Chip 15(11), 2364–2378 (2015)CrossRefGoogle Scholar
  5. E.M. Hamad, S.E.R. Bilatto, N.Y. Adly, D.S. Correa, B. Wolfrum, M.J. Schoning, A. Offenhausser, A. Yakushenko, Inkjet printing of UV-curable adhesive and dielectric inks for microfluidic devices. Lab Chip 16(1), 70–74 (2016)CrossRefGoogle Scholar
  6. T. Katoh, R. Tokuno, Y. Zhang, M. Abe, K. Akita, M. Akamatsu, Micro injection molding for mass production using LIGA mold inserts. Microsyst. Technol. 14(9–11), 1507–1514 (2008)CrossRefGoogle Scholar
  7. G. Kumar, A. Desai, J. Schroers, Bulk metallic glass: The smaller the better. Adv. Mater. 23(4), 461–476 (2011)CrossRefGoogle Scholar
  8. T.-Y. Lin, T. Do, P. Kwon, P.B. Lillehoj, 3D printed metal molds for hot embossing plastic microfluidic devices. Lab Chip 17(2), 241–247 (2017)CrossRefGoogle Scholar
  9. S. Moon, N. Lee, S. Kang, Fabrication of a microlens array using micro-compression molding with an electroformed mold insert. J. Micromech. Microeng. 13(1), 98–103 (2003)CrossRefGoogle Scholar
  10. C. Schuh, T. Hufnagel, U. Ramamurty, Mechanical behavior of amorphous alloys. Acta Mater. 55(12), 4067–4109 (2007)CrossRefGoogle Scholar
  11. W.H. Wang, The elastic properties, elastic models and elastic perspectives of metallic glasses. Prog. Mater. Sci. 57(3), 487–656 (2012)CrossRefGoogle Scholar
  12. S. Yi, K. Yien Chian, N. Nam-Trung, Low-pressure, high-temperature thermal bonding of polymeric microfluidic devices and their applications for electrophoretic separation. J. Micromech. Microeng. 16(8), 1681 (2006)CrossRefGoogle Scholar
  13. X. Zhang, B. Sun, N. Zhao, Q. Li, J. Hou, W. Feng, Experimental study on the surface characteristics of Pd-based bulk metallic glass. Appl. Surf. Sci. 321, 420–425 (2014)CrossRefGoogle Scholar
  14. X. Zhang, G. Fang, T.J. Jiang, N. Zhao, J.F. Li, B.W. Dun, Q. Li, Effects of cavity size and density on polymer micro hot embossing. Int. J. Precis. Eng. Manuf. 16(11), 2339–2346 (2015a)CrossRefGoogle Scholar
  15. X. Zhang, J. Ma, G. Fang, B.L. Sun, J.F. Li, Q. Li, Polymer micro molding with bulk metallic glass mold. Microsyst. Technol. 21(7), 1453–1457 (2015b)CrossRefGoogle Scholar
  16. X. Zhang, Y.S. Luo, J.F. Li, B.W. Dun, S.Y. He, S.J. Yan, Q. Li, An experimental investigation and modeling of micro array replication with Zr-based bulk metallic glass using a hot embossing process. Int. J. Mach. Tool. Manu. 117, 11–22 (2017)CrossRefGoogle Scholar

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© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  1. 1.School of Mechanics & Engineering ScienceZhengzhou UniversityZhengzhouChina
  2. 2.National Center for International Joint Research of Micro-Nano Molding TechnologyZhengzhou UniversityZhengzhouChina
  3. 3.Key Laboratory for Micro Molding Technology of Henan ProvinceZhengzhou UniversityZhengzhouChina
  4. 4.College of Mechanical Engineering and AutomationLiaoning University of TechnologyJinzhouChina

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