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A MEMS based Fabry–Pérot accelerometer with high resolution

  • Minghui Zhao
  • Kangli Jiang
  • Hongwu Bai
  • Hairong Wang
  • Xueyong WeiEmail author
Technical Paper
  • 20 Downloads

Abstract

Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.

Notes

Author contributions

The author’ contributions are as follows: MZ, and KJ conducted the experiment. MZ wrote the manuscript; HB, HW assisted with the experiments, sampling and laboratory analyses. XW was the Principal Investigator and supervised this work.

Funding

Supported by the National Key R&D Program of China (2018YFB2002303), Key research and development program of Shaanxi Province (2018ZDCXL-GY-02-03), National Natural Science Foundation of China (51575439) and 111 project (B12016). We also appreciate the support from State Key Laboratory of applied optics and International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies.

Compliance with ethical standards

Conflict of interest

The authors declare no competing financial interests.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2020

Authors and Affiliations

  1. 1.State Key Laboratory for Manufacturing Systems EngineeringXi’an Jiaotong UniversityXi’anChina
  2. 2.Xi’an Institute of Space Radio TechnologyXi’anChina
  3. 3.State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and PhysicsChinese Academy of SciencesChangchunChina

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