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Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation

  • Nabeel Khan
  • Mohammed Jalal AhamedEmail author
Technical Paper

Abstract

This paper presents beam modeling techniques for maximizing mechanical sensitivity of a butterfly resonator for gyroscopic applications. We investigate the geometric aspects of synchronizing beam that connects the wings of a butterfly resonator. Our results show that geometric variation in the synchronizing beam can have a large effect on the frequency split and sensitivity of the device. The model simulation shows a sensitivity of \( 10^{ - 12} \)\( (m/^\circ /s) \) for a frequency split of 10 Hz resulting from the optimized synchronized beam. Out of plane actuation was developed to drive and sense the resonators displacement. Fabricated butterfly resonators were tested, and the experimental results show a frequency split of 305 Hz and 400 Hz while the model illustrated a split of 195 Hz and 330 Hz respectively. The design and analysis presented in this paper can further aid the development of MEMS butterfly resonators for inertial sensing applications.

Notes

Acknowledgements

The authors would like to thank NSERC (Natural Sciences and Engineering Research Council of Canada) and Faculty of Engineering at University of Windsor for financial support. The authors would like to acknowledge CMC Microsystems (Canadian Microelectronics Corporation) for CAD tools, fabrication and equipment support.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Micro/Nano-Mechatronics LaboratoryUniversity of WindsorWindsorCanada

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