Advertisement

A novel bending microactuator with integrated flexible electro-rheological microvalves using an alternating pressure source for multi-actuator systems

  • Thapanun Sudhawiyangkul
  • Kazuhiro YoshidaEmail author
  • Sang In Eom
  • Joon-wan Kim
Technical Paper
  • 31 Downloads

Abstract

This paper presents a novel bending microactuator with integrated flexible electro-rheological microvalves (FERVs) using an alternating pressure source for multi-actuator systems. The proposed bending microactuator is a fluidic elastomer actuator that has two fluidic chambers inside and can bend with the chamber pressures controlled by the integrated FERVs, each of which has a flexible structure and changes a flow of electro-rheological fluid (ERF) through its viscosity change due to an applied electric field. The utilization of the FERVs in the actuator reduces the overall size, while the benefits of the alternating pressure source are reduction of the number of pipes in a multi-actuator system and removal of the fluid reservoir tank. The mathematical models were demonstrated and utilized for optimizing and designing the dimensions of the actuator to obtain the maximum bending angle, the fast response, and the highest output force. The designed actuator was successfully fabricated using MEMS technologies and experiments were conducted to investigate the bending angle and the response time of the successfully fabricated actuator. The results showed good agreement between the experimental results and the simulation results, which proved the validity of the proposed models. Comparing with the previously proposed microactuator with an FERV, the proposed actuator had 4.5 times larger bending angle. From the results, the optimized actuator showed the feasibility for use in e.g. micro gripper application.

Notes

References

  1. De Volder M, Yoshida K, Yokota S, Reynaerts D (2006) The use of liquid crystals as electrorheological fluids in microsystems. J Micromech Microeng 16:612–619.  https://doi.org/10.1088/0960-1317/16/3/017 CrossRefGoogle Scholar
  2. Gorissen B, Vincentie W, Al-bender F, De Volder M (2013) Modeling and bonding-free fabrication of flexible fluidic microactuators with a bending motion. J Micromech Microeng 23:045012.  https://doi.org/10.1088/0960-1317/23/4/045012 CrossRefGoogle Scholar
  3. Gorissen B, Chishiro T, Shimomura S, Reynaerts D, De Volder M, Konishi S (2014) Flexible pneumatic twisting actuators and their application to tilting micromirrors. Sens Actuators A Phys 216:426–431.  https://doi.org/10.1016/j.sna.2014.01.015 CrossRefGoogle Scholar
  4. Hwang Y, Paydar OH, Candler RN (2015) Pneumatic microfinger with balloon fins for linear motion using 3D printed molds. Sens Actuators A Phys 234:65–71.  https://doi.org/10.1016/j.sna.2015.08.008 CrossRefGoogle Scholar
  5. Kang HW, Hwan IH, Cho DW (2006) Development of a micro-bellows actuator using micro-stereolithography technology. Microelectron Eng 83:1201–1204.  https://doi.org/10.1016/j.mee.2006.01.228 CrossRefGoogle Scholar
  6. Kim JW, Yoshida K, Kouda K, Yokota S (2009) A flexible electro-rheological microvalve (FERV) based on SU-8 cantilever structures and its application to microactuators. Sens Actuators A Phys 156:366–372.  https://doi.org/10.1016/j.sna.2009.10.013 CrossRefGoogle Scholar
  7. Kohl M (2000) Fluidic actuation by electrorheological microdevices. Mechatronics 10:583–594CrossRefGoogle Scholar
  8. Kurumaya S, Suzumori K, Nabae H, Wakimoto S (2016) Musculoskeletal lower—limb robot driven by multifilament muscles. Robomech J 3:1–15.  https://doi.org/10.1186/s40648-016-0061-3 CrossRefGoogle Scholar
  9. Miyoshi T, Yoshida K, Eom SI, Yokota S (2015) Proposal of a multiple ER microactuator system using an alternating pressure source. Sens Actuators A Phys 222:167–175.  https://doi.org/10.1016/j.sna.2014.12.002 CrossRefGoogle Scholar
  10. Miyoshi T, Yoshida K, Kim JW, Eom SI, Yokota S (2016) An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source. Sens Actuators A Phys 245:68–75.  https://doi.org/10.1016/j.sna.2016.04.041 CrossRefGoogle Scholar
  11. Mosadegh B, Polygerinos P, Keplinger C et al (2014) Pneumatic networks for soft robotics that actuate rapidly. Adv Funct Mater 24:2163–2170.  https://doi.org/10.1002/adfm.201303288 CrossRefGoogle Scholar
  12. Peirs J, Reynaerts D, Van Brussel H (2001) A miniature manipulator for integration in a self-propelling endoscope. Sens Actuators A Phys 92:343–349CrossRefGoogle Scholar
  13. Sudhawiyangkul T, Yoshida K, Kim JW (2019) A study on a hybrid structure flexible electro-rheological microvalve for soft microactuators. Microsyst Technol.  https://doi.org/10.1007/s00542-019-04492-2 CrossRefGoogle Scholar
  14. Takemura K, Yajima F, Yokota S, Edamura K (2008) Integration of micro artificial muscle cells using electro-conjugate fluid. Sens Actuators A Phys 144:348–353.  https://doi.org/10.1016/j.sna.2008.02.011 CrossRefGoogle Scholar
  15. Wang Z, Volinsky AA, Gallant ND (2014) Crosslinking effect on polydimethylsiloxane elastic modulus measured by custom-built compression instrument. J Appl Polym Sci.  https://doi.org/10.1002/app.41050 CrossRefGoogle Scholar
  16. Wehner M, Truby RL, Fitzgerald DJ, Mosadegh B, Whitesides GM, Lewis JA, Wood RJ (2016) An integrated design and fabrication strategy for entirely soft, autonomous robots. Nature 536:451–455.  https://doi.org/10.1038/nature19100 CrossRefGoogle Scholar
  17. Yamaguchi A, Takemura K, Yokota S, Edamura K (2011) A robot hand using electro-conjugate fluid. Sens Actuators A Phys 170:139–146.  https://doi.org/10.1016/j.sna.2011.06.002 CrossRefGoogle Scholar
  18. Yap HK (2016) High-force soft printable pneumatics for soft robotic applications. Soft Robot 3:144–158.  https://doi.org/10.1089/soro.2016.0030 CrossRefGoogle Scholar
  19. Yoshida K, Yokota S (1993) Study on high-power micro-actuator using fluid power. In: Proc 6th Int Conf Flow Meas. (FLOMEKO’93), vol 1, pp 122–130Google Scholar
  20. Yoshida K, Yokota S (2005) A valve-integrated microactuator using homogeneous electro-rheological fluid. Sens Mater 17:097–112Google Scholar
  21. Yoshida K, Kikuchi M, Park JH, Yokota S (2002) Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments. Sens Actuators A Phys 95:227–233CrossRefGoogle Scholar
  22. Yoshida K, Tsukamoto N, Kim JW, Yokota S (2015) A study on a soft microgripper using MEMS-based divided electrode type flexible electro-rheological valves. Mechatronics 29:103–109.  https://doi.org/10.1016/j.mechatronics.2014.07.007 CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of EngineeringTokyo Institute of TechnologyMidori-ku, YokohamaJapan
  2. 2.Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST), Institute of Innovative Research (IIR)Tokyo Institute of TechnologyMidori-ku, YokohamaJapan
  3. 3.Department of IT-Automotive Engineering, College of EngineeringGwangju UniversityNam-GuRepublic of Korea

Personalised recommendations