Advertisement

Impact of design parameters on working stability of the electrothermal V-shaped actuator

  • Kien Trung Hoang
  • Dzung Tien Nguyen
  • Phuc Hong PhamEmail author
Technical Paper
  • 14 Downloads

Abstract

This paper mentions a detail calculation of the equivalent dynamic parameters in differential equations of motion of the electrothermal V-shaped actuator. A heat transfer model for a thin beam (including the dependence of material properties on the temperature) is applied in order to solve more exactly temperature distribution and displacement of V-shaped beam system. Comparing the values of displacement in both calculation and simulation confirmed a higher accuracy of proposed equations. Moreover, a related formula between the minimum conversion stiffness and driving voltage amplitude is analyzed and examined to avoid the buckling phenomenon may occur in V-shaped beam system while working at a high voltage.

Notes

Acknowledgements

This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under grant number: “107.01-2019.05”.

References

  1. Bullis WM, Brewer FH, Kolstad CD, Swartzendruber LJ (1968) Temperature coefficient of resistivity of silicon and germanium near room temperature. Solid-State Electron 11(7):639–646CrossRefGoogle Scholar
  2. Chiorean R-S (2015) Electro-thermo-mechanical modeling of V-beam actuators. Proc Technol 19:56–61CrossRefGoogle Scholar
  3. Enikov ET, Kedar SS, Lazarov KV (2004) Analytical and experimental analysis of folded beam and V-shaped thermal microactuators. In: SEM 10th international congress expo. Costa Mesa, CaliforniaGoogle Scholar
  4. Espinosa HD, Zhu Y, Moldovan N (2007) Design and operation of a MEMS-based material testing system for nanomechanical characterization. J Microelectromech Syst 16(5):1219–1231CrossRefGoogle Scholar
  5. Geisberger A, Kadylak D, Ellis M (2006) A silicon electrothermal rotational micro motor measuring one cubic millimeter. J Micromech Microeng 16(10):1943–1950CrossRefGoogle Scholar
  6. Gere JM (2004) Mechanics of materials, 6th edn. Thomson, StamfordGoogle Scholar
  7. Hu T, Zhao Y, Li X, Zhao Y, Bai Y (2017) Integration design of MEMS electro-thermal safety-and-arming devices. Microsyst Technol 23(4):953–958CrossRefGoogle Scholar
  8. Hull R (1999) Properties of crystalline silicon. INSPEC, LondonGoogle Scholar
  9. Li RG, Huang QA, Li WH (2008) A nodal analysis method for simulating the behavior of electrothermal microactuators. Microsyst Technol 14(1):119–129CrossRefGoogle Scholar
  10. Lott CD, McLain TW, Harb JN, Howell LL (2002) Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator. Sens Actuators A Phys 101(1–2):239–250CrossRefGoogle Scholar
  11. Maloney JM, Schreiber DS, Devoe DL (2004) Large-force electrothermal linear micromotors. J Micromech Microeng 14(2):226–234CrossRefGoogle Scholar
  12. Mayyas M, Stephanou H (2009) Electrothermoelastic modeling of MEMS gripper. Microsyst Technol 15(4):637–646CrossRefGoogle Scholar
  13. Pham PH, Hoang KT, Nguyen DQ (2019) Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density. Microsyst Technol 25(8):3111–3118CrossRefGoogle Scholar
  14. Shan T, Qi X, Cui L, Zhou X (2017) Thermal behavior modeling and characteristics analysis of electrothermal microactuators. Microsyst Technol 23(7):2629–2640CrossRefGoogle Scholar
  15. Shivhare P, Uma G, Umapathy M (2016) Design enhancement of a chevron electrothermally actuated microgripper for improved gripping performance. Microsyst Technol 22(11):2623–2631CrossRefGoogle Scholar
  16. Zhang Z, Yu Y, Liu X, Zhang X (2017a) Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators. Microsyst Technol 23(8):3775–3789CrossRefGoogle Scholar
  17. Zhang Z, Zhang W, Wu Q, Yu Y, Liu X, Zhang X (2017b) Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators. J Micromech Microeng 27(1):015023CrossRefGoogle Scholar
  18. Zhang Z, Yu Y, Zhang X (2018) Vibration analysis of V-shaped beam electrothermal microactuators. In: Proceeding 2nd international conference on cybernetics, robotics and control. CRC 2017, pp 80–84Google Scholar
  19. Zhao Y-L, Hu T-J, Li X-Y, Jiang Z-D, Ren W, Bai Y-W (2015) Design and characterization of a large displacement electro-thermal actuator for a new kind of safety-and-arming device. Energy Harvest Syst 2(3–4):143–148Google Scholar
  20. Zhu Y, Corigliano A, Espinosa HD (2006) A thermal actuator for nanoscale in situ microscopy testing: design and characterization. J Micromech Microeng 16(2):242–253CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  • Kien Trung Hoang
    • 1
  • Dzung Tien Nguyen
    • 2
  • Phuc Hong Pham
    • 1
    Email author
  1. 1.School of Mechanical EngineeringHanoi University of Science and Technology (HUST)HanoiVietnam
  2. 2.Institute for Control Engineering and AutomationHanoi University of Science and Technology (HUST)HanoiVietnam

Personalised recommendations