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A parasitic type piezoelectric actuator with an asymmetrical flexure hinge mechanism


A parasitic type actuator with an asymmetrical flexure hinge mechanism has been proposed in this study to achieve linear motion with a large working stroke. The principal output direction of the piezoelectric stack is vertical to the motion direction of the mover to obtain a large output load. The composition of the parasitic type actuator and working process are introduced and parasitic motion is explained. Finite element method has been applied to analyze the parasitic motion of the proposed asymmetrical flexure hinge mechanism. Moreover, an experiment system of the parasitic type actuator is set up, and experiments show that the positioning resolution of the actuator is around 0.1 μm; the maximum motion speed could achieve to 2850 μm/s when the input frequency f = 500 Hz and the input voltage Ue = 100 V; the maximum output force Fg is up to 750 g when the input frequency f = 1 Hz and the input voltage Ue = 100 V. This study indicates that the asymmetrical flexure hinge mechanism could achieve parasitic motion for the design and application of piezoelectric actuators with a large working stroke.

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  1. Bhagat U, Shirinzadeh B, Clark L, Chea P, Qin Y, Tian Y, Zhang D (2014) Design and analysis of a novel flexure-based 3-DOF mechanism. Mech Mach Theory 74:173–187

  2. Cagatay S, Koc B, Uchino K (2003) A 1.6-mm, metal tube ultrasonic motor. IEEE Trans Ultrason Ferroelectr 50:782–786

  3. Furutani K, Higuchi T, Yamagata Y, Mohri N (1998) Effect of lubrication on impact drive mechanism. Precis Eng 22:78–86

  4. Gu GY, Zhu LM, Su CY (2014) High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer. Smart Mater Struct 23:105007

  5. Hassani V, Tjahjowidodo T (2013) Dynamic modeling of 3-DOF pyramidal-shaped piezo-driven mechanism. Mech Mach Theory 70:225–245

  6. Heijer M, Fokkema V, Saedi A, Schakel P, Rost MJ (2014) Improving the accuracy of walking piezo motors. Rev Sci Instrum 85:055007

  7. Kim SC, Soo HK (1999) Precise rotary motor by inchworm motion using dual wrap belts. Rev Sci Instrum 70:2546–2550

  8. Li J, Zhao H, Qu H, Cui T, Fu L, Huang H, Ren L, Fan Z (2013) A piezoelectric-driven rotary actuator by means of inchworm motion. Sensor Actuators A Phys 194:269–276

  9. Li J, Zhou X, Zhao H, Shao M, Hou P, Xu X (2015) Design and experimental performances of a piezoelectric linear actuator by means of lateral motion. Smart Mater Struct 24:065007

  10. Li J, Zhou X, Zhao H, Shao MK, Li N, Zhang S, Du Y (2016) Development of a novel parasitic-type piezoelectric actuator. IEEE ASME Trans Mech 20:2021–2030

  11. Li J, Liu H, Zhao H (2017) A compact 2-DOF piezoelectric-driven platform based on Z-shaped flexure hinges. Micromachines 8(8):245

  12. Li J, Hu H, Takeshi M (2019) Stepping piezoelectric actuators with large working stroke for nano-positioning systems: a review. Sens Actuators A 292:39–51

  13. Liu Y, Chen W, Liu J, Shi S (2010) Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer. J Nerv Ment Dis 5:e10020

  14. Lu Q, Wen J, Hu Y, Chen K, Bao H, Ma J (2019) Novel inertial piezoelectric actuator with high precision and stability based on a two fixed-end beam structure. Smart Mater Struct 28:015030

  15. Lv B, Wang G, Li B, Zhou H, Hu Y (2018) Research on a 3-DOF Motion device based on the flexible mechanism driven by the piezoelectric actuators. Micromachines 9(11):578

  16. Mangaiyarkarasi P, Lakshmi P, Sasrika V (2019) Enhancement of vibration based piezoelectric energy harvester using hybrid optimization techniques. Microsyst Technol.

  17. Mathieu F, Larramendy F, Dezesta D, Huang C, Lavallee G, Miller S, Eichfeld CM, Mansfield W, Trolier-Mckinstry S, Nicu L (2013) Reducing parasitic effects of actuation and sensing schemes for piezoelectric microelectromechanical resonators. Microelectron Eng 111:68–76

  18. Mohith S, Navin Karanth P, Kulkarni SM (2019) Experimental investigation on performance of disposable micropump with retrofit piezo stack actuator for biomedical application. Microsyst Technol.

  19. Morita T, Kurosawa MK, Higuchi T (2002) A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (/spl phi/2.4 mm, L = 10 mm stator transducer). IEEE Trans Ultrason Ferroelectr 45:1178–1187

  20. Palosaari J, Leinonen M, Juuti J, Hannu J, Jantunen H (2014) Piezoelectric circular diaphragm with mechanically induced pre-stress for energy harvesting. Smart Mater Struct 23:085025

  21. Shi Y, Zhao C (2011) A new standing-wave-type linear ultrasonic motor based on in-plane modes. Ultrasonics 51:397–404

  22. Tian Y, Zhang D, Shirinzadeh B (2011) Dynamic modelling of a flexure-based mechanism for ultra-precision grinding operation. Precis Eng 35:554–565

  23. Wen J, Wan N, Wang R, Chen S, Zheng J, Li J (2019) A novel linear walking type piezoelectric actuator based on the parasitic motion of flexure mechanisms. IEEE Access 7:25908–25914

  24. Yao Q, Dong J, Ferreira PM (2007) Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int J Mach Tools Manuf 47:946–961

  25. Zareineja M, Rezaei SM, Abdullah A (2009) Development of a piezo-actuated micro-teleoperation system for cell manipulation. Int J Med Robot Comput 5:66–76

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This study is founded by the Natural Science Foundation of Zhejiang Province: LY19E050010 and LY18E050012.

Author information

Conceptualization: JL; formal analysis and test: YH; funding acquisition: JL and JW; writing—original draft: NW; writing—review and editing: JK.

Correspondence to Jianping Li.

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Wan, N., Wen, J., Hu, Y. et al. A parasitic type piezoelectric actuator with an asymmetrical flexure hinge mechanism. Microsyst Technol 26, 917–924 (2020).

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