A new apparatus for a moving induction heating and gas-assisted hot embossing apparatus has been developed. A mechanism was designed and implemented to move the platform in and out the wrapped coil, on which the sealed box for substrate/mold was placed. A chamber of 195 mm diameter and 221 mm length was machined. The movable platform, the sealed box with substrate/mold stack, wrapped coil and cooling fan were all implemented in the high pressure chamber. The nine-point thermocouples attached on the mold, thus, a temperature history of the moving induction heating can be obtained and study the influence of the moving path and power on the heating rate and temperature distribution. The micro V-cut structure hot embossing experiment were performed to prove the potential of this moving induction heating and gas-assisted pressuring hot embossing for fast fabrication of microstructure onto polymeric substrates. As a results, replication rates were all above 95% at 200 °C and 5 kgf/cm2 and the cycle time was less than 4 min and the optic measurement shows the replicated V-cut film can enhance the 36.8% illuminance. The experiment results show the manufacturing potential of this apparatus.
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Chen Q, Zhang L, Chen G (2014) Far infrared-assisted embossing and bonding of poly(methyl methacrylate) microfluidic chips. RSC Adv 4(99):56440–56444
Gao H, Tan H, Zhang W, Morton K, Chou SY (2006) Air cushion press for excellent uniformity, high yield, and fast nanoimprint across a 100 mm field. Nano Lett 6(11):2438–2441
Goral VN, Hsieh Y-C, Petzold ON, Faris RA, Yuen PK (2011) Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds. J Micromech Microeng 21(1):017002
Hocheng H, Wen TT (2008) Innovative approach to uniform imprint of micron and submicron features. J Achiev Mater Manuf Eng 28(1):79–82
Hong S-K, Heo Y-M, Kang J (2008) Replication of polymeric micro patterns by rapid thermal pressing with induction heating apparatus. In: 2008 3rd IEEE international conference on nano/micro engineered and molecular systems, pp 911–915
Lin H-L, Chen S-C, Jeng M-C, Minh PS, Chang J-A, Hwang J-R (2012) Induction heating with the ring effect for injection molding plates. Int Commun Heat Mass Transf 39(4):514–522
Nian S-C, Tsai T-H, Huang M-S (2016) Novel inductive hot embossing for increasing micromolding efficiency. Int Commun Heat Mass Transf 70:38–46
Seunarine K, Gadegaard N, Riehle MO, Wilkinson CDW (2006) Optical heating for short hot embossing cycle times. Microelectron Eng 83(4–9):859–863
Sun Y, Wang Y, Yang X, Pang L (2013) A novel coil distribution for transverse flux induction heating. Phys Proc 50:32–37
Totten GE, Funatani K, Xie L (2004) Handbook of metallurgical process design. CRC Press, Boca Raton
Xie P et al (2014) Rapid hot embossing of polymer microstructures using carbide-bonded graphene coating on silicon stampers. Surf Coat Technol 258:174–180
Yang H-A, Lin C-W, Peng C-Y, Fang W (2006) On the selective magnetic induction heating of micron scale structures. J Micromech Microeng 16(7):1314
Zhang B, Cui J, Duan J, Cui M (2017) A new fabrication method for nano-gratings based on the high flexibility of PDMS. Opt Laser Technol 92:206–210
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Kao, C., Ke, K., Hung, W. et al. Hot embossing of microstructure with moving induction heating and gas-assisted pressuring. Microsyst Technol 26, 957–967 (2020). https://doi.org/10.1007/s00542-019-04560-7