In this paper, an analytical model of squeeze film damping (SQFD) of perforated plates in the free molecular regime is developed, which is based on: (1) the modification of the perforated energy transfer model (P-ETM) (Li and Hu, J Micromech Microeng 21:025006, 2011) by giving the probability of molecules entering the gap through holes; (2) the application of Sumali’s formula (J Micromech Microeng 17:2231–2240, 2007) to relate to the Monte Carlo model (MC) (Hutcherson and Ye, J Micromech Microeng 14:1726–1733, 2004) quantitatively. The analytical model can model the perforation effect on SQFD of plates of various hole sizes. Compared with experiment data and numerical models, the analytical model is proved to be accurate, easy to operate. The effect of gap distance on SQFD of perforated plate in the free molecular regime is discussed. Due to perforation effect, as gap distance increases, the damping constant of non-perforated plate decreases faster than that of perforated plate of the same size.
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This work is supported by the National Natural Science Foundation of China (Grant No. 51375091).
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