Clamped-free micro-scale transversely isotropic thermoelastic beam resonators
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The design of smart sensors/actuators are significantly affected due to clamped-free boundary condition. An analytical expressions for the thermoelastic damping (TED) and frequency shift of homogenous, transversely isotropic thermoelastic micro-scale clamped-free beam with linearly varying thickness, based on Euler–Bernoulli theory, have been derived. The effect of length and thickness on the quality factor of TED has been explored in detail with the help of MATLAB programming software and computer simulated results illustrated for Silicon Nitride micro-beam resonators with linearly varying thickness.