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Research of a novel stereoscopic symmetrical quadruple hair gyroscope

  • Xin Guo
  • Bo Yang
  • Cheng Li
Technical Paper
  • 20 Downloads

Abstract

This paper presents a novel stereoscopic symmetrical quadruple hair gyroscope (SSQHG) which is distinguished from the conventional flat structures to achieve better angular rate measurement performance. A symmetrical device architecture is designed to realize the differential detection of Coriolis force, thereby effectively eliminate the common mode interference. Four stereoscopic hair posts are adopted to increase the quality of the lumped inertia masses, so as to enhance the measurement sensitivity. A simplified mass-spring-damper model of idealized SSQHG is established and verified by a modal simulation to synthetic analysis the motion modal. A set of finite element method simulations including modal distribution simulation and harmonic response simulation are implemented to acquire accurate vibration information and to identify the structure parameters quantitatively. A micromachining procedure based on the standard deep dry silicon on glass is adopted to fabricate the proposed micro-gyroscope. The frequency response experiments indicate that the vacuum packaged prototype has a drive mode frequency of 536.2 Hz with a quality factor of 1319.7 and a sense mode frequency of 535.7 Hz with a quality factor of 1334.5. An analog closed-loop driving circuit is designed to realize the self-excited oscillation of SSQHG and an open-loop sensing circuit is designed to extract the Coriolis force signal. The preliminary experimental results demonstrate that the fabricated SSQHG prototype exhibits an angular rate sensitivity of 16.03 mV/°/s and a bias instability of 16.26°/h at room temperature.

Notes

Acknowledgements

The authors wish to thank the support of the National Natural Science Foundation of China (Grant nos. 61571126 and 61874025), the Aviation Science Foundation (Grant no. 20150869005), Equipment pre-research field foundation (Grant no. 6140517010316JW06001), the Fundamental Research Funds for the Central Universities (Grant no. 2242018k1G017), the Eleventh Peak Talents Programme Foundation in the Six New Industry Areas and Postgraduate training innovation Foundation of Jiangsu Province (Grant no. KYCX18_0077).

Compliance with ethical standards

Conflict of interest

The authors declare no conflict of interest.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Instrument Science and EngineeringSoutheast UniversityNanjingChina
  2. 2.Key Laboratory of Micro-Inertial Instrument and Advanced Navigation TechnologyMinistry of EducationNanjingChina

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