Research of a novel stereoscopic symmetrical quadruple hair gyroscope

  • Xin Guo
  • Bo YangEmail author
  • Cheng Li
Technical Paper


This paper presents a novel stereoscopic symmetrical quadruple hair gyroscope (SSQHG) which is distinguished from the conventional flat structures to achieve better angular rate measurement performance. A symmetrical device architecture is designed to realize the differential detection of Coriolis force, thereby effectively eliminate the common mode interference. Four stereoscopic hair posts are adopted to increase the quality of the lumped inertia masses, so as to enhance the measurement sensitivity. A simplified mass-spring-damper model of idealized SSQHG is established and verified by a modal simulation to synthetic analysis the motion modal. A set of finite element method simulations including modal distribution simulation and harmonic response simulation are implemented to acquire accurate vibration information and to identify the structure parameters quantitatively. A micromachining procedure based on the standard deep dry silicon on glass is adopted to fabricate the proposed micro-gyroscope. The frequency response experiments indicate that the vacuum packaged prototype has a drive mode frequency of 536.2 Hz with a quality factor of 1319.7 and a sense mode frequency of 535.7 Hz with a quality factor of 1334.5. An analog closed-loop driving circuit is designed to realize the self-excited oscillation of SSQHG and an open-loop sensing circuit is designed to extract the Coriolis force signal. The preliminary experimental results demonstrate that the fabricated SSQHG prototype exhibits an angular rate sensitivity of 16.03 mV/°/s and a bias instability of 16.26°/h at room temperature.



The authors wish to thank the support of the National Natural Science Foundation of China (Grant nos. 61571126 and 61874025), the Aviation Science Foundation (Grant no. 20150869005), Equipment pre-research field foundation (Grant no. 6140517010316JW06001), the Fundamental Research Funds for the Central Universities (Grant no. 2242018k1G017), the Eleventh Peak Talents Programme Foundation in the Six New Industry Areas and Postgraduate training innovation Foundation of Jiangsu Province (Grant no. KYCX18_0077).

Compliance with ethical standards

Conflict of interest

The authors declare no conflict of interest.


  1. Acar C, Shkel A (2009) MEMS vibratory gyroscopes-structural approaches to improve robustness (MEMS Reference Shelf). Springer, Berlin (ISBN 978-0-387-09535-6) CrossRefGoogle Scholar
  2. Braxmaier M, Gaisser A, Link T (2003) Cross-coupling of the oscillation modes of vibratory gyroscopes. In: 12th international conference on solid-state sensors, actuators and microsystems, Boston, MA, USA, pp 167–170Google Scholar
  3. Brucker C, Bauer D, Chaves H (2007) Dynamic response of micro-pillar sensors measuring fluctuating wall-shear-stress. Exp Fluids 42(5):737–749CrossRefGoogle Scholar
  4. Bruinink CM, Jaganatharaja RK, de Boer MJ, Berenschot JW, Kolster ML, Lammerink TSJ, Wiegerink RJ, Krijnen GJM (2009) Advancements in technology and design of biomimetic flow sensor arrays. In: MEMS 2009, Sorrento, Italy, pp 152–155Google Scholar
  5. Droogendijk H, Brookhuis RA, de Boer MJ, Sanders RGP, Krijnen GJM (2012) Design and fabrication of a biomimetic gyroscope inspired by the fly’s haltere. In: IEEE sensors 2012, Taipei, Taiwan, pp 1400–1403Google Scholar
  6. Fang JC, Li JL (2009) Integrated model and compensation of thermal errors of silicon micro electromechanical gyroscope. J IEEE Trans Instrum Meas 58:2923–2930CrossRefGoogle Scholar
  7. Froyum K, Goepfert S, Henrickson J, Thorland J (2012) Honeywell micro electro mechanical systems (MEMS) inertial measurement unit (IMU). In: PLANS 2012, Myrtle Beach, SC, USA, pp 831–836Google Scholar
  8. Geiger W, Butt WU, Gaiber A, Frech J (2002) Decouple micro-gyros and the design principle DAVER. Sens Actuators A 95:239–249CrossRefGoogle Scholar
  9. Krause AG, Winger M, Blasius TD, Lin Q, Painter O (2012) A high-resolution microchip optomechanical accelerometer. Nat Photonics 6:768–772CrossRefGoogle Scholar
  10. Lan JH, Nahavandi S (2007) Development of low cost motion sensing system. J Meas 40:415–421CrossRefGoogle Scholar
  11. Pottenger MD (2001) Design of Micromechanical inertial sensors. Dissertation, University of CaliforniaGoogle Scholar
  12. Rajendran S, Liewa KM (2004) Design and simulation of an angular rate vibrating microgyroscope. J Sens Actuators A 116:241–256CrossRefGoogle Scholar
  13. Shaeffer DK (2013) MEMS inertial sensors: a tutorial overview. IEEE Commun Mag 51(4):100–109CrossRefGoogle Scholar
  14. Shi Q, Wang S, Qiu A, Xu Y, Ji X (2006) Design principle of suspension of MEMS gyroscope. In: 1st IEEE international conference on nano/micro engineered and molecular systems, Zhuhai, China, pp 242–245Google Scholar
  15. Sonmezoglu S, Alper SE, Akin T (2014b) An automatically mode matched MEMS gyroscope with wide and tunable bandwidth. J Microelectromech Syst 23(2):284–297CrossRefGoogle Scholar
  16. Sonmezoglu S, Giscard HD, Azgin K, Alper SE (2014a) Simultaneous detection of linear and Coriolis accelerations on a mode-matched MEMS gyroscope. In: MEMS 2014, San Francisco, CA, USA, pp 32–35Google Scholar
  17. Tanaka M (2007) An industrial and applied review of new MEMS devices features. Microelectron Eng 84(5):1341–1344CrossRefGoogle Scholar
  18. Tang Y, Najafi K (2016) High aspect-ratio low-noise multi-axis accelerometers made from thick silicon. In: 2016 IEEE international symposium on inertial sensors and systems, Laguna Beach, CA, USA, pp 121–124Google Scholar
  19. Trusov A, Atikyan G, Rozelle D, Meyer A, Zotov S, Simon BR, Shkel AM (2014) Flat is not dead: current and future performance of Si-MEMS Quad Mass Gyro (QMG) System. In: PLANS 2014, Monterey, CA, USA, pp 252–258Google Scholar
  20. Xia D, Yu C, Kong L (2014) The development of micromachined gyroscope structure and circuitry technology. Sensors 14:1394–1473CrossRefGoogle Scholar
  21. Yang B, Wang XJ, Hu D, Wu L (2017) Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope. Microsyst Technol 23(1):151–162CrossRefGoogle Scholar
  22. Yang B, Yin Y, Huang LB, Wang SR (2011) Research on a new decoupled dual-mass micro-gyroscope. In: ICEMI 2011, Chengdu, China, pp 205–208Google Scholar
  23. Yazdi N, Ayazi F, Najafi, K (1999) Micromachined inertial sensors. In: 1999 IEEE/RSJ international conference on intelligent robots and systems, Kyongju, South Korea, pp 1640–1659Google Scholar
  24. Zhang T, Zhou B, Song ML, Lin ZH, Jin SX, Zhang R (2017) Structural parameter identification of the center support quadruple mass gyro. IEEE Sens J 17(12):3765–3775CrossRefGoogle Scholar
  25. Zhang T, Zhou B, Yin P, Chen Z, Zhang R (2016a) Optimal design of a center support quadruple mass gyroscope (CSQMG). Sensors 16(5):613CrossRefGoogle Scholar
  26. Zhang T, Zhou B, Yin P, Li S, Zhang R (2016b) Multi-order system dynamic model of the center support quadruple mass gyro (CSQMG). In: IEEE Sensors 2016, Orlando, FL, USA, pp 1–3Google Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.School of Instrument Science and EngineeringSoutheast UniversityNanjingChina
  2. 2.Key Laboratory of Micro-Inertial Instrument and Advanced Navigation TechnologyMinistry of EducationNanjingChina

Personalised recommendations