Research of a novel stereoscopic symmetrical quadruple hair gyroscope
- 45 Downloads
This paper presents a novel stereoscopic symmetrical quadruple hair gyroscope (SSQHG) which is distinguished from the conventional flat structures to achieve better angular rate measurement performance. A symmetrical device architecture is designed to realize the differential detection of Coriolis force, thereby effectively eliminate the common mode interference. Four stereoscopic hair posts are adopted to increase the quality of the lumped inertia masses, so as to enhance the measurement sensitivity. A simplified mass-spring-damper model of idealized SSQHG is established and verified by a modal simulation to synthetic analysis the motion modal. A set of finite element method simulations including modal distribution simulation and harmonic response simulation are implemented to acquire accurate vibration information and to identify the structure parameters quantitatively. A micromachining procedure based on the standard deep dry silicon on glass is adopted to fabricate the proposed micro-gyroscope. The frequency response experiments indicate that the vacuum packaged prototype has a drive mode frequency of 536.2 Hz with a quality factor of 1319.7 and a sense mode frequency of 535.7 Hz with a quality factor of 1334.5. An analog closed-loop driving circuit is designed to realize the self-excited oscillation of SSQHG and an open-loop sensing circuit is designed to extract the Coriolis force signal. The preliminary experimental results demonstrate that the fabricated SSQHG prototype exhibits an angular rate sensitivity of 16.03 mV/°/s and a bias instability of 16.26°/h at room temperature.
The authors wish to thank the support of the National Natural Science Foundation of China (Grant nos. 61571126 and 61874025), the Aviation Science Foundation (Grant no. 20150869005), Equipment pre-research field foundation (Grant no. 6140517010316JW06001), the Fundamental Research Funds for the Central Universities (Grant no. 2242018k1G017), the Eleventh Peak Talents Programme Foundation in the Six New Industry Areas and Postgraduate training innovation Foundation of Jiangsu Province (Grant no. KYCX18_0077).
Compliance with ethical standards
Conflict of interest
The authors declare no conflict of interest.
- Braxmaier M, Gaisser A, Link T (2003) Cross-coupling of the oscillation modes of vibratory gyroscopes. In: 12th international conference on solid-state sensors, actuators and microsystems, Boston, MA, USA, pp 167–170Google Scholar
- Bruinink CM, Jaganatharaja RK, de Boer MJ, Berenschot JW, Kolster ML, Lammerink TSJ, Wiegerink RJ, Krijnen GJM (2009) Advancements in technology and design of biomimetic flow sensor arrays. In: MEMS 2009, Sorrento, Italy, pp 152–155Google Scholar
- Droogendijk H, Brookhuis RA, de Boer MJ, Sanders RGP, Krijnen GJM (2012) Design and fabrication of a biomimetic gyroscope inspired by the fly’s haltere. In: IEEE sensors 2012, Taipei, Taiwan, pp 1400–1403Google Scholar
- Froyum K, Goepfert S, Henrickson J, Thorland J (2012) Honeywell micro electro mechanical systems (MEMS) inertial measurement unit (IMU). In: PLANS 2012, Myrtle Beach, SC, USA, pp 831–836Google Scholar
- Pottenger MD (2001) Design of Micromechanical inertial sensors. Dissertation, University of CaliforniaGoogle Scholar
- Shi Q, Wang S, Qiu A, Xu Y, Ji X (2006) Design principle of suspension of MEMS gyroscope. In: 1st IEEE international conference on nano/micro engineered and molecular systems, Zhuhai, China, pp 242–245Google Scholar
- Sonmezoglu S, Giscard HD, Azgin K, Alper SE (2014a) Simultaneous detection of linear and Coriolis accelerations on a mode-matched MEMS gyroscope. In: MEMS 2014, San Francisco, CA, USA, pp 32–35Google Scholar
- Tang Y, Najafi K (2016) High aspect-ratio low-noise multi-axis accelerometers made from thick silicon. In: 2016 IEEE international symposium on inertial sensors and systems, Laguna Beach, CA, USA, pp 121–124Google Scholar
- Trusov A, Atikyan G, Rozelle D, Meyer A, Zotov S, Simon BR, Shkel AM (2014) Flat is not dead: current and future performance of Si-MEMS Quad Mass Gyro (QMG) System. In: PLANS 2014, Monterey, CA, USA, pp 252–258Google Scholar
- Yang B, Yin Y, Huang LB, Wang SR (2011) Research on a new decoupled dual-mass micro-gyroscope. In: ICEMI 2011, Chengdu, China, pp 205–208Google Scholar
- Yazdi N, Ayazi F, Najafi, K (1999) Micromachined inertial sensors. In: 1999 IEEE/RSJ international conference on intelligent robots and systems, Kyongju, South Korea, pp 1640–1659Google Scholar
- Zhang T, Zhou B, Yin P, Li S, Zhang R (2016b) Multi-order system dynamic model of the center support quadruple mass gyro (CSQMG). In: IEEE Sensors 2016, Orlando, FL, USA, pp 1–3Google Scholar