Microsystem Technologies

, Volume 25, Issue 4, pp 1437–1446 | Cite as

Design and analysis of MEMS based piezoelectric energy harvester for machine monitoring application

  • Dipta ChaudhuriEmail author
  • Sudip Kundu
  • Neela Chattoraj
Technical Paper


In this paper a new structure of MEMS based piezoelectric (PZ) energy harvester with resonant frequency of 100 Hz is proposed which can be integrated with machine monitoring wireless sensor nodes. Various geometries having different structures of PZ cantilevers have been investigated. The constant length of 5 mm is chosen for all the cantilever beams. A new Perforated Tapered shaped cantilever beam has been proposed. The achieved resonant frequency of the final proposed perforated Tapered structure with proof mass is 101 Hz, which is 27.5% lower than that of the commonly used rectangular structure having same dimensions (including proof mass). The peak voltage output of the proposed structure is 8.5 V which 97% higher than that of the commonly used rectangular structure.



We, the authors, would like to express our special thanks to Science and Engineering Research Board (SERB), Govt. of India for funding to execute this research. This research was not possible without the help and support of BIT Mesra, Ranchi and SERB, Govt. of India.


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Birla Institute of TechnologyRanchiIndia

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