Microsystem Technologies

, Volume 25, Issue 2, pp 735–745 | Cite as

Lithography-induced hydrophobic surfaces of silicon wafers with excellent anisotropic wetting properties

  • Jiajing ZhuEmail author
  • Yanling Tian
  • Xianping Liu
  • Chengjuan Yang
Technical Paper


In recent years, hydrophobic surfaces have attracted more and more attentions from many researchers. In this paper, we comprehensively discussed the effects of specific parameters of microstructures on the wetting properties by using the theoretical models, the effects of microstructures on two-dimensional anisotropic properties and the water droplet impact experiment. Firstly, the relationships between the CAs and variable parameters were explored after the formula derivation for three various patterns. Then three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of microstructures (including LWD parameters and interval parameters) on surface wettability were studied based on the theoretical research. After that, the effects of microstructures on two-dimensional anisotropic properties were also studied. Finally, the water droplet impact experiment was carried out and the viscoelastic properties were simply investigated. Our research proposed a potential method for fabricating hydrophobic surfaces with excellent anisotropic properties. This method may be widely used in a variety of academic and industrial applications in the future.



This work was supported by China-EU H2020 International Science and Technology Cooperation Project (FabSurfWAR Nos. 2016YFE0112100 and 644971) and National Natural Science Foundations of China [Nos. 51405333, 51675371, 51675376 and 51675367]. The authors are particularly grateful to Tianjin University and Xian Jiaotong University for the technical support. Jiajing Zhu wish to gratefully acknowledge the financial support by China Scholarship Council.


  1. Arifvianto B, Mahardika M, Dewo P (2011) Effect of surface mechanical attrition treatment (SMAT) on microhardness, surface roughness and wettability of AISI 316L. Mater Chem Phys 125:418–426CrossRefGoogle Scholar
  2. Barthlott W, Neinhuis C (1997) Purity of the sacred lotus, or escape from contamination in biological surfaces. Planta 202:1–8CrossRefGoogle Scholar
  3. Barthlott W, Schimmel T, Wiersch S et al (2010) The salvinia paradox: superhydrophobic surfaces with hydrophilic pins for air retention under water. Adv Mater 22:2325–2328CrossRefGoogle Scholar
  4. Bixler GD, Bhushan BF (2013) Fluid drag reduction and efficient self-cleaning with rice leaf and butterfly wing bioinspired surfaces. Nanoscale 5:7685–7710CrossRefGoogle Scholar
  5. Bizi-bandoki P, Valette S, Audouard E (2013) Time dependency of the hydrophilicity and hydrophobicity of metallic alloys subjected to femtosecond laser irradiations. Appl Surf Sci 273:399–407CrossRefGoogle Scholar
  6. Cai Y, Lin L, Xue Z et al (2014) Filefish inspired surface design for anisotropic underwater oleophobicity. Adv Funct Mater 24:809–816CrossRefGoogle Scholar
  7. Cassie A, Baxter S (1994) Wettability of porous surfaces. Trans Faraday Soc 40:546–551CrossRefGoogle Scholar
  8. Chen F, Zhang D, Yang Q (2010) Anisotropic wetting on microstrips surface fabricated by femtosecond laser. Langmuir 27:359–365CrossRefGoogle Scholar
  9. Doll K, Fadeeva E, Stumpp NS (2016) Reduced bacterial adhesion on titanium surfaces micro-structured by ultra-short pulsed laser ablation. BioNanoMaterials 17:1–2CrossRefGoogle Scholar
  10. Feng L, Li S, Li Y et al (2002) Super-hydrophobic surfaces: from natural to artificial. Adv Mater 14:1857–1860CrossRefGoogle Scholar
  11. Feng X, Gao Q, Wu X et al (2007) Superior water repellency of water strider legs with hierarchical structures: experiments and analysis. Langmuir 23:4892–4896CrossRefGoogle Scholar
  12. Gao XY, Guo ZG (2017) Biomimetic superhydrophobic surfaces with transition metals and their oxides: a review. J Bionic Eng 14:401–439CrossRefGoogle Scholar
  13. Gao X, Yan X, Yao X et al (2010) The dry-style antifogging properties of mosquito compound eyes and artificial analogues prepared by soft lithography. Adv Mater 19:2213–2217CrossRefGoogle Scholar
  14. He Y, Jiang CY, Yin HX (2011) Tailoring the wettability of patterned silicon sur-faces with dual-scale pillars: from hydrophilicity to superhydrophobicity. Appl Surf Sci 257:7689–7692CrossRefGoogle Scholar
  15. Kahng B, Jeong H, Barabasi AL (2001) Quantum dot and hole formation in sputter erosion. Appl Phys Lett 78:805–807CrossRefGoogle Scholar
  16. Kim T, Tahk D, Lee HH (2009) Wettability-Controllable super water- and moderately oil-repellent surface fabricated by wet chemical etching. Langmuir 25:6576–6579CrossRefGoogle Scholar
  17. Li H, Yu S, Han X (2016) A stable hierarchical superhydrophobic coating on pipeline steel surface with self-cleaning, anticorrosion, and anti-scaling properties. Colloid Surf A—Physicochem Eng Asp 503:43–52CrossRefGoogle Scholar
  18. Liu K, Du J, Wu J et al (2012) Superhydrophobic gecko feet with high adhesive forces towards water and their bio-inspired materials. Nanoscale 4:768–772CrossRefGoogle Scholar
  19. Vasilii B, Valentina M, Artem K et al (2018) Hydrophilic/hydrophobic surface modification impact on colloid lithography: schottky-like defects, dislocation, and ideal distribution. Appl Surf Sci 6:443–448Google Scholar
  20. Wang G, Guo Z, Liu W (2014) Interfacial effects of superhydrophobic plant surfaces: a review. J Bionic Eng 11:325–345CrossRefGoogle Scholar
  21. Wenzel RN (1936) Resistance of solid surfaces to wetting by water. J Ind Eng Chem 28:988–994CrossRefGoogle Scholar
  22. Yang XM, Zhong ZW, Diallo EM et al (2014) Silicon wafer wettability and aging behaviors: impact on gold thin-film morphology. Math Sci Semicond Proc 26:25–32CrossRefGoogle Scholar
  23. Yong J, Yang Q, Chen F et al (2014) A simple way to achieve superhydrophobicity, controllable water adhesion, anisotropic sliding, and anisotropic wetting based on femtosecond-laser-induced line-patterned surfaces. J Mater Chem A 2:5499–5507CrossRefGoogle Scholar
  24. Young T (1805) An essay on the cohesion of fluids. Philos Trans R Soc A 95:65–87CrossRefGoogle Scholar
  25. Zhang G, Zhang J, Xie G et al (2006) Cicada wings: a stamp from nature for nanoimprint lithography. Small 2:1440–1443CrossRefGoogle Scholar
  26. Zhang X, Zhang J, Ren Z et al (2009) Morphology and wettability control of silicon cone arrays using colloidal lithography. Langmuir 25:7375–7382CrossRefGoogle Scholar
  27. Zhang D, Chen F, Yang Q et al (2011) Mutual wetting transition between isotropic and anisotropic on directional structures fabricated by femotosecond laser. Soft Matter 7:8337–8342CrossRefGoogle Scholar
  28. Zheng Y, Gao X, Jiang L et al (2007) Directional adhesion of superhydrophobic butterfly wings. Soft Matter 3:178–182CrossRefGoogle Scholar
  29. Zhu JJ, Tian YL, Yang CJ et al (2017a) Lithography-induced wettability Changes of Silicon. In: Shanghai: 2017 IEEE International Conference of Manipulation, Manufacturing and Measurement on the Nanoscale (3 M-NANO)Google Scholar
  30. Zhu JJ, Tian YL, Yang CJ, Liu XP (2017b) Low-cost and fast fabrication of the ultrasonic embossing on polyethylene terephthalate (PET) films using laser processed molds. Microsyst Technol 23:5653–5668CrossRefGoogle Scholar
  31. Zhu JJ, Tian YL, Liu XP (2018) Rapid fabrication of super-hydrophobic surfaces of silicon wafers with excellent anisotropic wetting. Microsyst Technol 24:1–7CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Jiajing Zhu
    • 1
    Email author
  • Yanling Tian
    • 1
    • 2
  • Xianping Liu
    • 1
  • Chengjuan Yang
    • 2
  1. 1.School of EngineeringUniversity of WarwickCoventryUK
  2. 2.Key Laboratory of Mechanism Theory and Equipment Design of Ministry of EducationTianjin UniversityTianjinChina

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