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Microsystem Technologies

, Volume 25, Issue 2, pp 477–486 | Cite as

Analysis of microstructure replication using vibratory assisted thermal imprint process

  • Amer Sodah
  • Rimvydas Gaidys
  • Birutė Narijauskaitė
  • Rokas Šakalys
  • Giedrius Janušas
  • Arvydas Palevičius
  • Paulius PalevičiusEmail author
Technical Paper
  • 37 Downloads

Abstract

In this article, thermal imprint process for replication of high-quality microstructures on the surface of polymer is investigated. Vibrations has been previously employed as an additional measure to enhance the replicability of microstructure into the pre-heated polymer. On the other hand, polymer behavior under the action of vibrations is not sufficiently studied. In this article, thermal microstructure replication is modeled and simulated by applying vibratory assisted thermal imprint to provide a better comprehension of the replication process peculiarities that would lead to improvement of the replication process itself. Different aspects of the process are analyzed: depth of imprinted pattern, pressure, traction force, residual field of plastic deformations and stresses. Numerical simulation results are verified experimentally. The results of the research shows that process assistance with vibratory excitation results in higher imprint depth compared with the specimens, imprinted under the identical process conditions without vibratory excitation.

Notes

Funding

This research was funded by the Grant no. S-MIP-17-102 from the Research Council of Lithuania.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Faculty of Mechanical Engineering and DesignKaunas University of TechnologyKaunasLithuania
  2. 2.Faculty of Mathematics and Natural SciencesKaunas University of TechnologyKaunasLithuania

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