Microsystem Technologies

, Volume 25, Issue 1, pp 237–243 | Cite as

Rapid fabrication of super-hydrophobic surfaces of silicon wafers with excellent anisotropic wetting

  • Jiajing ZhuEmail author
  • Yanling Tian
  • Xianping Liu
Technical Paper


In recent years, the fabrication of hydrophobic and super-hydrophobic surfaces has been a hotspots in research field. In this study, we proposed a novel method by combining the laser ablation technology and chemical salinization process to obtain the hydrophobic and even the super-hydrophobic silicon surfaces. Three different types of patterns (linear patterns, square patterns and dot patterns) were fabricated on the silicon wafers and the surface morphology of various patterns were observed by optical microscope. Then the effects of LWD parameters and interval parameters on surface wettability were studied by measuring the values of the contact angles (always written in CA). Additionally, the relationships between the LWD parameters, interval parameters and the two-dimensional anisotropic properties after the salinization process were also studied in this paper. This method may play a significant role in academic and industrial applications regarding to the functional surfaces, microfluidic devices, micro-electronics and so on.



This work was supported by China-EU H2020 International Science and Technology Cooperation Project (FabSurfWAR nos. 2016YFE0112100 and 644971) and National Natural Science Foundations of China [nos. 51405333, 51675371, 51675376 and 51675367]. The authors are particularly grateful to Tianjin University and Xian Jiaotong University for the technical support. Jiajing Zhu wish to gratefully acknowledge the financial support by China Scholarship Council.


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.School of EngineeringUniversity of WarwickCoventryUK
  2. 2.Key Laboratory of Mechanism Theory and Equipment Design of Ministry of EducationTianjin UniversityTianjinChina

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