Microsystem Technologies

, Volume 25, Issue 1, pp 57–68 | Cite as

Integral sliding mode control for nonlinear damped model of arch microbeams

  • Arman Rajaei
  • Amin Vahidi-Moghaddam
  • Moosa AyatiEmail author
  • Mostafa Baghani
Technical Paper


In this paper, a second order integral sliding mode controller (SMC) and a two-dimensional integral sliding mode controller are designed for a nonlinear damped model of arch microbeam with two electrodes as a bistable system. The latest model of the arch microbeam is introduced in which the squeezed film damping effect is modeled through considering nonlinear terms. The actuating voltage is considered as the control effort of the system somehow expands as a combined static DC and harmonic AC voltage. The second order integral SMC and two-dimensional integral SMC are proposed as the robust controllers to stabilize the system in the presence of the uncertain parameter due to the damping coefficient. The controller formula, stability and convergence of the closed-loop system are derived and formulated for the arch microbeam. Simulation results and comparison of the proposed controllers are presented to demonstrate the performance of the designed control schemes for achieving set point tracking in the closed-loop system.



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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.School of Mechanical EngineeringShiraz UniversityShirazIran
  2. 2.School of Mechanical Engineering, College of EngineeringUniversity of TehranTehranIran

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