On the application of micro hot embossing for mass fabrication of template-based dielectric resonator antenna arrays
- 27 Downloads
In this article, application of micro-replication of polymers in the field of next generation mm-wave antennas is presented for the first time. The concept is applied to recently proposed template-based dielectric resonator antenna arrays fabricated by deep X-ray lithography. In this work, the array templates are replicated by hot embossing of polymethyl methacrylate (PMMA) layers using a nickel mold insert fabricated from the direct X-ray exposed PMMA master (LIGA process). Transfer quality of the master pattern is examined through measurements by optical microscope. Under controlled conditions, a number of templates are replicated demonstrating repeatable quality and consistent performance among the devices. A four element dielectric resonator antenna array is fabricated and measured for the impedance bandwidth response. This proposed methodology has the potential to enable low cost and mass utilization of dielectric resonator antennas and arrays in future millimeter-wave applications.
We acknowledge the Karlsruhe Nano Micro Facility (KNMF) (http://www.kit.edu/knmf) of the Karlsruhe Institute of Technology (KIT) for provision of access to instruments at their laboratories. Special thanks to Dr. Matthias Worgull for his guidance in hot embossing process.
- Andreas R (2017) Pre-5G and 5G: Will The mmWave Link Work? Microw J 60(12):56–72Google Scholar
- Bijumon PV, Freundorfer AP, Sayer M, Antar YMM (2007) High gain on-chip dielectric resonator antennas using silicon technology for millimeter wave wireless links. In: Can. Conf. Electr. Comput. Eng., pp 804–807Google Scholar
- Deng S-M, Chen T-W, Kan H-H (2001) A CPW-fed rectangular dielectric resonator antenna. In: Proc. APMC, Taipei, Taiwan, R.O.C, vol 2, pp 954–957Google Scholar
- Guttmann M, Schulz J, Saile V (2008) Lithographic fabrication of mold inserts, chapter 8. Wiley-Blackwell, pp 187–219Google Scholar
- Petosa A (2006) Dielectric resonator antenna handbook, 1st edn. Artech House Publishers, NorwoodGoogle Scholar
- Schanz G, Bade K (2008) Microelectroforming of metals, chapter 14. Wiley-Blackwell, pp 395–420Google Scholar
- Wang T, Li G, Huang B, Miao Q, Fang J, Li P, Tan H, Li W, Ding J, Li J, Wang Y (2017) Spectrum Analysis and Regulations for 5G. In: 5G Mob. Commun. Springer International Publishing, Cham, pp 27–50Google Scholar
- Wissmann M, Guttmann M, Hartmann M (2010) Alternative technology for fabrication of nano- or microstructured mould inserts used for optical components. SPIE. Micromach. Microfabr. Process Technol, San Francisco, p 10Google Scholar
- Worgull M (2009) Hot embossing: theory and technology of microreplication, ser. Micro and nano technologies. Elsevier ScienceGoogle Scholar