Applied Physics A

, 125:291 | Cite as

Fabrication of microfluidic channels with various cross-sectional shapes using anisotropic etching of Si and self-alignment

  • Dong-Ki Lee
  • Joo Yong Kwon
  • Young Hak ChoEmail author


A novel and simple fabrication method was proposed to produce microfluidic channels with various cross-sectional shapes, such as parallelogram, rhombus, pentagon and hexagon. The present study has the advantages of not only fabricating the microfluidic channel shapes that have not been reported before, but also the fabrication process is simple, flexible and robust. Microfluidic channels were fabricated using anisotropic wet etching of Si wafer and self-alignment between Si structure and PDMS mold. In this regard, (100) single crystal Si wafer was used to fabricate the Si microchannel and the master for PDMS mold using photolithography and anisotropic KOH etching. The Si structure for the microchannel and master were formed from the same Si wafer by KOH etching, and the PDMS mold was made from the Si master. Finally, the microchannels with various cross-sectional shapes could be easily formed through self-alignment of the Si microchannel and PDMS mold. They were permanently bonded using O2 plasma treatment. It is expected that the fabricated microchannel with various cross-sectional shapes can be used in wide fields such as heat transfer, microscale transport of particle and fluid, and particle separation based on inertial focusing.



This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korean government (No. NRF-2017R1D1A1B03029817).


  1. 1.
    D.C. Duffy, J.C. McDonald, O.J.A. Schueller, G.M. Whitesides, Anal. Chem. 23, 4974–4984 (1998)CrossRefGoogle Scholar
  2. 2.
    L. Martynova, L.E. Locascio, M. Gaitan, G.W. Kramer, R.G. Christensen, W.A. MacCrehan, Anal. Chem. 69, 4783–4789 (1997)CrossRefGoogle Scholar
  3. 3.
    S. Prakash, S. Kumar, Proc. Inst. Mech. Eng. Part B J. Eng. Manuf. 229, 1273–1288 (2015)CrossRefGoogle Scholar
  4. 4.
    A. Tamayol, M. Bahrami, J. Fluids Eng. 132, 111201 (2010)CrossRefGoogle Scholar
  5. 5.
    A. Tamayol, K. Hooman, J. Fluids Eng. 133, 091202 (2011)CrossRefGoogle Scholar
  6. 6.
    M. Sadeghi, A. Sadeghi, M.H. Saidi, J. Fluids Eng. 138, 031104 (2016)CrossRefGoogle Scholar
  7. 7.
    J.S. Choi, Y. Piao, T.S. Seo, Bioprocess Biosyst. Eng. 36, 1871–1878 (2013)CrossRefGoogle Scholar
  8. 8.
    T.Q. Nguyen, W.-T. Park, Sens. Actuators B 235, 302–308 (2016)CrossRefGoogle Scholar
  9. 9.
    J. Xing, W. Rong, D. Sun, L. Wang, L. Sun, Sens. Actuators B 248, 613–621 (2017)CrossRefGoogle Scholar
  10. 10.
    D.P. Parekh, C. Ladd, L. Panich, K. Moussa, Lab. Chip 16, 1812–1820 (2016)CrossRefGoogle Scholar
  11. 11.
    J. Park, D. Kim, G. Kim, Y. Kim, E. Choi, A. Levchenko, Lab. Chip 10, 2130–2138 (2010)CrossRefGoogle Scholar
  12. 12.
    P. Mukherjee, X. Wang, J. Zhou, L. Papautsky, Lab. Chip 19, 147–157 (2019)CrossRefGoogle Scholar
  13. 13.
    J. Kim, J. Lee, C. Wu, S. Nam, D. Di Carlo, W. Lee, Lab. Chip 16, 992–1001 (2016)CrossRefGoogle Scholar
  14. 14.
    R. Moloudi, S. Oh, C. Yang, M.E. Warkiani, M.W. Naing, Microfluid. Nanofluid. 22, 33 (2018)CrossRefGoogle Scholar
  15. 15.
    M. Mastrangeli, Q. Zhou, V. Sariola, P. Lambert, Soft Matter 13, 304–327 (2017)ADSCrossRefGoogle Scholar
  16. 16.
    G. Kim, B. Kim, J. Brugger, Sens. Actuators A 107, 132–136 (2003)CrossRefGoogle Scholar
  17. 17.
    J.Y. Kwon, D.-K. Lee, Y.H. Cho, J. Korean Soc. Precis. Eng. 36, 287–291 (2019)CrossRefGoogle Scholar
  18. 18.
    M.A. Unger, H.P. Chou, T. Thorsen, A. Scherer, S.R. Quake, Science 288, 113–116 (2000)ADSCrossRefGoogle Scholar
  19. 19.
    H. Amini, W. Lee, D. Di Carlo, Lab. Chip 14, 2739–2761 (2014)CrossRefGoogle Scholar
  20. 20.
    E.S. Asmolov, J. Fluid Mech. 381, 63–87 (1999)ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Graduate School of Nano IT Design FusionSeoul National University of Science and TechnologySeoulSouth Korea
  2. 2.Department of Mechanical System and Design EngineeringSeoul National University of Science and TechnologySeoulSouth Korea

Personalised recommendations