Applied Physics A

, 125:69 | Cite as

Machinability improvement of silicon carbide via femtosecond laser surface modification method

  • Binbin Meng
  • Jian Zheng
  • Dandan Yuan
  • Shaolin XuEmail author


In this paper, the laser-induced periodic surface structures (LIPSS) of single-crystal SiC and the machining properties of the modified layer are studied. The distribution of surface features as a function of laser repetition frequency and the phase of micro/nanostructures of the surface modification layer are investigated. Furthermore, wear and machinability of the modified SiC layer are analyzed using nano-scratching. The results indicate that surface modification with the femtosecond laser can effectively reduce the pushing and extrusion of material as well as facilitate removal of materials. The hybrid-grinding method can also reduce the influence of the size effect during processing, which effectively improves machinability of SiC during ultra-precision grinding process.



This work was supported by the National Natural Science Foundation of China (Grant No. 51705233) and Natural Science Foundation of Guangdong Province (Grant No. 2018A030310125).


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Department of Mechanical and Energy EngineeringSouthern University of Science and TechnologyShenzhenPeople’s Republic of China
  2. 2.School of Power and Mechanical EngineeringWuhan UniversityWuhanPeople’s Republic of China

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