Abstract
Pulsed excimer lasers are the by far strongest and most efficient laser sources in the ultraviolet spectral region. On account of the unique lateral resolution of 1 μm, which is achievable with excimer-laser based processing systems as well as of the large field size covered within each laser shot, excimer lasers are indispensable laser sources in pulsed-laser deposition, high-precision marking, low-temperature surface annealing and large-area micropatterning.
The innovative potential of excimer lasers and related beam delivery technology for large-area processing applications is reviewed.
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References
R. Delmdahl, G. von Oldershausen, J. Mol. Struct. 744–747, 255 (2005)
R. Delmdahl, R. Pätzel, Appl. Phys. A 93, 611 (2008)
A. Usoskin, L. Kirchhoff, J. Knoke, B. Prause, A. Rutt, V. Selskij, D. Farrell, IEEE Trans. Appl. Supercond. 17, 3235 (2007)
A. Masters, T. Geuking, Laser Focus World 41, 99 (2005)
B. Rajendran, R.S. Shenoy, D.J. Witte, N.S. Chokshi, R.L. DeLeon, G.S. Tompa, R.F.W. Pease, IEEE Trans. Electron Devices 54, 707 (2007)
R. Pätzel, B. Turk, J. Brune, S. Govorkov, F. Simon, Phys. Status Solidi (c) 10, 3215 (2008)
R. Delmdahl, Laser User 50, 8 (2009)
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Delmdahl, R., Fechner, B. Large-area microprocessing with excimer lasers. Appl. Phys. A 101, 283–286 (2010). https://doi.org/10.1007/s00339-010-5818-6
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DOI: https://doi.org/10.1007/s00339-010-5818-6