Analytical and Bioanalytical Chemistry

, Volume 410, Issue 11, pp 2849–2857 | Cite as

Quantification of elemental area densities in multiple metal layers (Au/Ni/Cu) on a Cr-coated quartz glass substrate for certification of NMIJ CRM 5208-a

  • Tomoko Ariga
  • Yanbei Zhu
  • Mika Ito
  • Toshiko Takatsuka
  • Shinya Terauchi
  • Akira Kurokawa
  • Kazumi Inagaki
Research Paper

Abstract

Area densities of Au/Ni/Cu layers on a Cr-coated quartz substrate were characterized to certify a multiple-metal-layer certified reference material (NMIJ CRM5208-a) that is intended for use in the analysis of the layer area density and the thickness by an X-ray fluorescence spectrometer. The area densities of Au/Ni/Cu layers were calculated from layer mass amounts and area. The layer mass amounts were determined by using wet chemical analyses, namely inductively coupled plasma mass spectrometry (ICP-MS), isotope-dilution (ID-) ICP-MS, and inductively coupled plasma optical emission spectrometry (ICP-OES) after dissolving the layers with diluted mixture of HCl and HNO3 (1:1, v/v). Analytical results of the layer mass amounts obtained by the methods agreed well with each another within their uncertainty ranges. The area of the layer was determined by using a high-resolution optical scanner calibrated by Japan Calibration Service System (JCSS) standard scales. The property values of area density were 1.84 ± 0.05 μg/mm2 for Au, 8.69 ± 0.17 μg/mm2 for Ni, and 8.80 ± 0.14 μg/mm2 for Cu (mean ± expanded uncertainty, coverage factor k = 2). In order to assess the reliability of these values, the density of each metal layer calculated from the property values of the area density and layer thickness measured by using a scanning electron microscope were compared with available literature values and good agreement between the observed values and values obtained in previous studies.

Keywords

Area density Certified reference material Elemental determination Multiple metal layers Uncertainty 

Notes

Compliance with ethical standards

Conflict of interest

The authors declare they have no conflict of interest.

Research involving human participants and/or animals

This work does not contain any studies with human participants or animals.

References

  1. 1.
    Abe C, Sakamoto F, Ohtsu N, Ashino T, Wagatsuma K. Quantitative evaluation of calcium phosphate on surface of titanium by x-ray fluorescence analysis. Mater Trans. 2009;50(9):2297–301.CrossRefGoogle Scholar
  2. 2.
    Shao H, Xu Q. Preparation of standard samples and standard reference materials for microbeam analysis. Nucl Inst Methods Phys Res B. 1995;104(1):201–3.CrossRefGoogle Scholar
  3. 3.
    Pritzkow W, Vogl J, Berger A, Ecker K, Grötzschel R, Klingbeil P, et al. Contribution of ICP-IDMS to the certification of antimony implanted in a silicon wafer—comparison with RBS and INAA results. Fresenius J Anal Chem. 2001;371(6):867–73.CrossRefGoogle Scholar
  4. 4.
    Davanloo F, Lee TJ, Park H, You JH, Collins CB. Adhesion measurements of non-crystalline diamond films prepared by a laser plasma discharge source. J Adhes Sci Technol. 1993;7(12):1323–34.CrossRefGoogle Scholar
  5. 5.
    Ecker KH, Wätjen U, Berger A, Persson L, Pritzkow W, Radtke M, et al. RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon—a multi-method approach to characterize and certify a reference material. Nucl Inst Methods Phys Res B. 2002;188(1–4):120–5.CrossRefGoogle Scholar
  6. 6.
    Ecker KH, Wätjen U, Berger A, Grötzschel R, Persson L, Pritzkow W, et al. Certification of Antimony Implanted in Silicon Wafer with a Silicon Dioxide Diffusion Barrier, IRMM-302, BAM-L001. Geel: European Commission - Joint Research Centre (European Communities and Bundesanstalt für Materialforschung und -prüfung); 2001.Google Scholar
  7. 7.
    Vogl J, Pritzkow W. Isotope dilution mass spectrometry—a primary method of measurement and its role for RM certification. Mapan. 2010;25(3):135–64.CrossRefGoogle Scholar
  8. 8.
    ISO GUM. Guide to the expression of uncertainty in measurement. Geneva: International Standards Organization; 2008.Google Scholar
  9. 9.
    Ellison S.L.R. and Williams A. (Eds) Quantifying uncertainty in analytical measurement 3rd ed, EURACHEM/CITAC Guide CG 4. London: EURACHEM; 2012. p. 89–96.Google Scholar
  10. 10.
    National Astronomical Observatory of Japan. Chronological Scientific Table 2017. Tokyo: Maruzen Publishing Co., LTD.; 2016. p. 385–90.Google Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Tomoko Ariga
    • 1
  • Yanbei Zhu
    • 1
  • Mika Ito
    • 1
  • Toshiko Takatsuka
    • 1
  • Shinya Terauchi
    • 1
  • Akira Kurokawa
    • 1
  • Kazumi Inagaki
    • 1
  1. 1.Research Institute for Material and Chemical Measurement, National Metrology Institute of Japan (NMIJ)National Institute of Advanced Industrial Science and Technology (AIST)TsukubaJapan

Personalised recommendations