Accuracy of the pattern transfer from the metal mask to the workpiece surface during multiphase jet machining

  • Yan Hu
  • Qingwen Dai
  • Wei Huang
  • Xiaolei WangEmail author


Multiphase jet machining (MJM) is a recently developed surface texturing method based on which a mixture of abrasives and water is accelerated by compressed air to remove material from substrates. Considering the high divergence of the jet, masks are needed for MJM to obtain the desired features and dimensions. To investigate the pattern transfer accuracy, masks were prepared from a 304 stainless steel sheet using laser machining. The fundamental parameters of MJM as well as the effects of the mask opening width and thickness on the processing of the structures were studied and experimentally optimized. The use of wax to fix the mask on the substrate is proposed to avoid the frosted area around the machining structures. Overall, the optimized process MJM parameters can be used to fabricate various surface textures with the desired accuracy and dimensions.


Multiphase jet machining Transfer accuracy Masked surface texture 



The authors gratefully acknowledge Mr. Chen for his help in providing the instrument-aided measurement.

Funding information

This work was financially supported by the National Natural Science Foundation of China (No. 51675268 and 51805252) and China Postdoctoral Science Foundation (No. 2019 M651822).


  1. 1.
    Wang XL, Adachi K, Otsuka K, Kato K (2006) Optimization of the surface texture for silicon carbide sliding in water. Appl Surf Sci 253(3):1282–1286CrossRefGoogle Scholar
  2. 2.
    Shi LP, Wang XY, Su X, Wei H, Wang XL (2015) Comparison of the performances of mechanical gas seals textured with micro-grooves and micro-dimples. J Tribol 138(2):88–90Google Scholar
  3. 3.
    Wang XY, Shi LP, Dai QW, Huang W, Wang XL (2018) Multi-objective optimization on dimple shapes for gas face seals. Tribol Int 123:216–223CrossRefGoogle Scholar
  4. 4.
    Etsion I (2005) State of the art in laser surface texturing. Trans ASME J Tribol 127(1):761–762Google Scholar
  5. 5.
    Coblas DG, Fatu A, Maoui A, Hajjam M (2015) Manufacturing textured surfaces: State of art and recent developments. Proc IME J J Eng Tribol 229(1):3–29CrossRefGoogle Scholar
  6. 6.
    Qian SQ, Zhu D, Qu NS, Li HS, Yan DS (2010) Generating micro-dimples array on the hard chrome-coated surface by modified through mask electrochemical micromachining. Int J Adv Manuf Technol 47(9-12):1121–1127CrossRefGoogle Scholar
  7. 7.
    Wu X, Li L, He N (2017) Investigation on the burr formation mechanism in micro cutting. Precis Eng 47:191–196CrossRefGoogle Scholar
  8. 8.
    Chae J, Park SS, Freiheit T (2006) Investigation of micro-cutting operations. Int J Mach Tool Manu 46(3):313–332CrossRefGoogle Scholar
  9. 9.
    Zhang T, Liu ZQ, Xu CH (2013) Influence of size effect on burr formation in micro cutting. Int J Adv Manuf Technol 68(9-12):1911–1917CrossRefGoogle Scholar
  10. 10.
    Belloy E, Thurre S, Walckiers E, Sayah A, Gijs MAM (2000) The introduction of powder blasting for sensor and microsystem applications. Sensors Actuators A Phys 84(3):330–337CrossRefGoogle Scholar
  11. 11.
    Haghbin N, Spelt JK, Papini M (2015) Abrasive waterjet micro-machining of channels in metals: comparison between machining in air and submerged in water. Int J Mach Tool Manu 88:108–117CrossRefGoogle Scholar
  12. 12.
    Park DS, Cho MW, Lee H, Cho WS (2004) Micro-grooving of glass using micro-abrasive jet machining. J Mater Process Technol 146(2):234–240CrossRefGoogle Scholar
  13. 13.
    Haghbin N, Ahmadzadeh F, Papini M (2018) Masked micro-channel machining in aluminum alloy and borosilicate glass using abrasive water jet micro-machining. J Manuf Process 35:307–316CrossRefGoogle Scholar
  14. 14.
    Wang FC, Xu QW, Feng DC, Guo CW (2017) Experiment study on performance of abrasive slurry jet with or without high polymer in stainless steel machining. Int J Adv Manuf Technol 95(1):1–8Google Scholar
  15. 15.
    Tsai FC, Yan BH, Kuan CY, Huang FY (2008) A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel. Int J Mach Tool Manu 48(7):932–945CrossRefGoogle Scholar
  16. 16.
    Sobczak R, Prazmo J, Perec A, Chmielik I (2016) Dust free surface treatment parameters of the three-phase jet, generated in the sandbot device. MM Sci J 01:872–876CrossRefGoogle Scholar
  17. 17.
    Su X, Shi LP, Huang W, Wang XL (2016) A multi-phase micro-abrasive jet machining technique for the surface texturing of mechanical seals. Int J Adv Manuf Technol 86(5-8):1–8CrossRefGoogle Scholar
  18. 18.
    Shi LP, Fang Y, Dai QW, Huang W, Wang XL (2017) Surface texturing on SiC by multiphase jet machining with microdiamond abrasives. Mater Manuf Process 33(13):1415–1421CrossRefGoogle Scholar
  19. 19.
    Miller DS (2004) Micromachining with abrasive waterjets. J Mater Process Technol 149(1):37–42CrossRefGoogle Scholar
  20. 20.
    Papini M, Ciampini D, Krajac T, Spelt JK (2003) Computer modelling of interference effects in erosion testing: effect of plume shape. Wear 255(1):85–97CrossRefGoogle Scholar
  21. 21.
    Haghbin N, Ahmadzadeh F, Spelt JK, Papini M (2016) High pressure abrasive slurry jet micro-machining using slurry entrainment. Int J Adv Manuf Technol 84(5-8):1031–1043Google Scholar
  22. 22.
    Zhang L, Kuriyagawa T, Yasutomi U, Zhao J (2005) Investigation into micro abrasive intermittent jet machining. Int J Mach Tool Manu 45(7-8):873–879CrossRefGoogle Scholar
  23. 23.
    Wensink H, Jansen HV, Berenschot JW, Elwenspoek MC (2000) Mask materials for powder blasting. J Micromech Microeng 10(2):175–180CrossRefGoogle Scholar
  24. 24.
    Saragih AS, Ko TJ (2009) A thick SU-8 mask for microabrasive jet machining on glass. Int J Adv Manuf Technol 41(7-8):734–740CrossRefGoogle Scholar
  25. 25.
    Ghobeity A, Krajac T, Burzynski T, Papini M, Spelt JK (2008) Surface evolution models in abrasive jet micromachining. Wear 264(3):185–198CrossRefGoogle Scholar
  26. 26.
    Nouhi A, Lari MRS, Spelt JK, Papini M (2015) Implementation of a shadow mask for direct writing in abrasive jet micro-machining. J Mater Process Technol 223:232–239CrossRefGoogle Scholar
  27. 27.
    Ghobeity A, Papini M, Spelt JK (2009) An analytical model of the effect of particle size distribution on the surface profile evolution in abrasive jet micromachining. J Mater Process Technol 209(20):6067–6077CrossRefGoogle Scholar
  28. 28.
    Wensink H, Elwenspoek MC (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators a-Physical 102(1-2):157–164CrossRefGoogle Scholar
  29. 29.
    Matsumura T, Muramatsu T, Fueki S (2011) Abrasive water jet machining of glass with stagnation effect. CIRP Ann Manuf Technol 60(1):355–358CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  1. 1.National Key Laboratory of Science and Technology on Helicopter TransmissionNanjing University of Aeronautics and AstronauticsNanjingChina

Personalised recommendations