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Material removal mechanisms in chemical-magnetorheological compound finishing

  • Huazhuo Liang
  • Qiusheng Yan
  • Jiabin LuEmail author
  • Bin Luo
  • Xiaolan Xiao
ORIGINAL ARTICLE
  • 12 Downloads

Abstract

With a view to ultra-precision polishing of SiC wafers, the chemical-magnetorheological compound finishing (CMRF) method was proposed based on the principle of the Fenton reaction. To study material removal characteristics of CMRF, a force model for polishing pads based on magnetorheological (MR) effects was built. Through the theory of solid-phase particles, this study conducted a force analysis of carbonyl iron powders and abrasives and calculated polishing forces of a single polishing pad based on MR effects on a workpiece surface. Based on this, according to the Preston equation, a material removal model was established. By conducting the CMRF test on monocrystalline SiC wafers, it is found that the test results were consistent with theoretical calculations.

Keywords

Chemical-magnetorheological compound finishing Modelling Polishing force Material removal SiC wafer 

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Notes

Funding information

This work was supported by the NSFC-Guangdong Joint Fund Project (Grant No. U1801259), Science and Technology Project of Guangdong Province (Grant No. 2016A010102014), and Guangdong Graduate Education Innovation Project (2018JGXM35, 2018SFKC15).

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Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2019

Authors and Affiliations

  • Huazhuo Liang
    • 1
  • Qiusheng Yan
    • 1
  • Jiabin Lu
    • 1
    Email author
  • Bin Luo
    • 1
  • Xiaolan Xiao
    • 1
  1. 1.School of Electromechanical EngineeringGuangdong University of TechnologyGuangzhouChina

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