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A precision polishing method for Wolter-I type optical mandrel

  • Fanxing Kong
  • Tao SunEmail author
  • Yanquan GengEmail author
ORIGINAL ARTICLE
  • 28 Downloads

Abstract

In the application of the 13.5-nm extreme ultraviolet (EUV) collector optics of the discharge produced plasma (DPP) source, the Wolter-I structure based on the X-ray grazing incidence optical design is usually adopted. The requirement of the surface roughness of this collector optics is demanding, which should reach to several nanometers. Currently, the mandrel replication is the main fabrication technology of this collector optics. Obviously, the requirement of the surface roughness of the mandrel used for the replication process should reach to the same level of the collector optics. However, the fabrication of the Wolter-I mandrel with high surface quality requirement still faces great challenge. In this paper, we propose a method that applies an elastic spherical tool to polish the surface of the Wolter-I mandrel, in which the shape of the elastic sphere can be changed relatively easily to accommodate the aspherical surface of the Wolter-I mandrel. A mathematical model regarding the movement trace of the polishing tool was established. Based on this model, the contact force between the polishing sphere and the aspherical surface can be controlled to point from the center of the polishing sphere in the normal direction to the polishing point. The influence of the polishing parameters on the material removal thicknesses is simulated and analyzed. The polishing experiments of ellipsoid and hyperboloid are carried out considering the difference of the diameter of each radial section on the Wolter-I mandrel surface. The proposed method is proved to reduce the surface roughness of the mandrel coated with chemically deposited nickel-phosphorous (NiP) alloy after diamond turning effectively. The root mean square (RMS) roughness of the mandrel surface after polishing can be reduced to 1.56 nm. It indicates that this method is suitable for further polishing of nickel-plated Wolter-I mandrel after ultra-precision turning. As a result, the manufacturing precision and efficiency of the Wolter-I mandrels can be improved by using the proposed polishing approach in this study, and the manufacturing cost can be reduced accordingly.

Keywords

Wolter-I Optical mandrel Extreme ultraviolet Aspherical Replication manufacturing 

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Notes

Acknowledgements

We gratefully acknowledge Doctor Jinghe Wang, Shusen Guo, and Engineer Qiang Zhang for their technical assistance in the process of machining and measuring the workpiece. We thank Accdon for its linguistic assistance during the preparation of this manuscript.

Funding information

This work was supported by a grant from the major project of high-grade CNC machine tool and fundamental manufacturing equipment science and technology (No. 2011ZX04004-031).

References

  1. 1.
    Wood OR II (2017) EUVL: challenges to manufacturing insertion. J Photopolym Sci Technol 30(5):599–604.  https://doi.org/10.2494/photopolymer.30.599 CrossRefGoogle Scholar
  2. 2.
    Egle W, Hafner W, Matthes A, Erzin E, Gänswein B, Schwarz H, Marczuk P, Antoni M, Singer W, Melzer F, Hainz J (2004) EUV collectors: design, development, fabrication, and testing. Proc SPIE 5193:39–49.  https://doi.org/10.1117/12.507736 CrossRefGoogle Scholar
  3. 3.
    Altmann J, Egle W, Bingel U, Hafner W, Gänswein B, Schwarz H, Neugschwender A (1998) Mirror system for the German X-ray satellite ABRIXAS: I. flight mirror fabrication, integration, and testing. Proc SPIE 3444:350–359.  https://doi.org/10.1117/12.331249 CrossRefGoogle Scholar
  4. 4.
    Beaucamp ATH, Namba Y, Freeman RR (2012) Automated finishing of diamond turned dies for hard X-ray and EUV optics replication. Proc SPIE 85020F:115–123.  https://doi.org/10.1117/12.929632 Google Scholar
  5. 5.
    Marczuk P, Egle W (2004) Source collection optics for EUV lithography. Proc SPIE 5533:145–157.  https://doi.org/10.1117/12.549409 CrossRefGoogle Scholar
  6. 6.
    Kim DW, Burge JH, Davis JM, Martin HM, Tuell MT, Graves LR, West SC (2016) New and improved technology for manufacture of GMT primary mirror segments. Proc SPIE 9912:99120P.  https://doi.org/10.1117/12.2231911 CrossRefGoogle Scholar
  7. 7.
    Schindler A, Haensel T, Nickel A, Thomas HJ, Lammert H, Siewert F (2003) Finishing procedure for high performance synchrotron optics. Proc SPIE 5180:64–72.  https://doi.org/10.1117/12.506505 CrossRefGoogle Scholar
  8. 8.
    Ghigo M, Cerutti P, Citterio O, Conconi P, Mazzoleni F (1997) Ion-beam polishing of electroless nickel masters for x-ray replication optics. Proc SPIE 3113:342–349.  https://doi.org/10.1117/12.278863 CrossRefGoogle Scholar
  9. 9.
    Yang B, Xie XH, Zhou L, Hu H (2017) Design of a large five-axis ultra-precision ion beam figuring machine: structure optimization and dynamic performance analysis. Int J Adv Manuf Technol 92(9–12):3413–3424.  https://doi.org/10.1007/s00170-017-0347-5 CrossRefGoogle Scholar
  10. 10.
    Khurana A, Singh AK, Bedi TS (2017) Spot nanofinishing using ball nose magnetorheological solid rotating core tool. Int J Adv Manuf Technol 92(1–4):1173–1183.  https://doi.org/10.1007/s00170-017-0166-8 CrossRefGoogle Scholar
  11. 11.
    Beier M, Scheiding S, Gebhardt A, Loose R, Risse S, Eberhardt R, Tünnermann A (2013) Fabrication of high precision metallic freeform mirrors with magnetorheological finishing (MRF). Proc SPIE 8884:88840S.  https://doi.org/10.1117/12.2035986 CrossRefGoogle Scholar
  12. 12.
    Wang Y, Yin S, Hu T (2018) Ultra-precision finishing of optical mold by magnetorheological polishing using a cylindrical permanent magnet. Int J Adv Manuf Technol 97(9–12):3583–3594.  https://doi.org/10.1007/s00170-018-2199-z CrossRefGoogle Scholar
  13. 13.
    Lee JW, Ha SJ, Cho YK, Kim BK, Cho MW (2015) Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra precision polishing of micro mold pattern. J Mech Sci Technol 29(5):2205–2211.  https://doi.org/10.1007/s12206-015-0136-8 CrossRefGoogle Scholar
  14. 14.
    Chen FJ, Miao XL, Tang Y, Yin SH (2017) A review on recent advances in machining methods based on abrasive jet polishing (AJP). Int J Adv Manuf Technol 90(1–4):785–799.  https://doi.org/10.1007/s00170-016-9405-7 CrossRefGoogle Scholar
  15. 15.
    Beaucamp A, Namba Y, Messelink W, Walker D, Charlton P, Freeman R (2014) Surface integrity of fluid jet polished tungsten carbide. Procedia CIRP 13:377–381.  https://doi.org/10.1016/j.procir.2014.04.064 CrossRefGoogle Scholar
  16. 16.
    Li ZZ, Wang JM, Peng XQ, Ho LT, Yin ZQ, Li SY, Cheung CF (2011) Removal of single point diamond-turning marks by abrasive jet polishing. Appl Opt 50(16):2458–2463.  https://doi.org/10.1364/AO.50.002458 CrossRefGoogle Scholar
  17. 17.
    Beaucamp A, Namba Y, Charlton P (2014) Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher. Appl Opt 53(14):3075–3080.  https://doi.org/10.1364/AO.53.003075 CrossRefGoogle Scholar
  18. 18.
    Zhan JM (2013) Study on the manufacturing process controlling for aspheric surface ballonet polishing. Int J Adv Manuf Technol 69(1–4):171–179.  https://doi.org/10.1007/s00170-013-5009-7 CrossRefGoogle Scholar
  19. 19.
    Jiang T, Liu JD, Pi J, Xu ZL, Shen ZH (2018) Simulation and experimental study on the concave influence function in high efficiency bonnet polishing for large aperture optics. Int J Adv Manuf Technol 97(5–8):2431–2437.  https://doi.org/10.1007/s00170-018-2068-9 CrossRefGoogle Scholar
  20. 20.
    Dong Z, Cheng H, Tam HY (2014) Modified subaperture tool influence functions of a flat-pitch polisher with reverse-calculated material removal rate. Appl Opt 53(11):2455–2464.  https://doi.org/10.1364/AO.53.002455 CrossRefGoogle Scholar
  21. 21.
    Tian FJ, Li ZG, Lv C, Liu GB (2016) Polishing pressure investigations of robot automatic polishing on curved surfaces. Int J Adv Manuf Technol 87(1–4):639–646.  https://doi.org/10.1007/s00170-016-8527-2 CrossRefGoogle Scholar
  22. 22.
    Yang MY, Lee HC (2001) Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die. J Mater Process Technol 116(2):298–304.  https://doi.org/10.1016/S0924-0136(01)01055-X CrossRefGoogle Scholar
  23. 23.
    Li HY, Walker D, Yu GY, Zhang W (2013) Modeling and validation of polishing tool influence functions for manufacturing segments for an extremely large telescope. Appl Opt 52(23):5781–5787.  https://doi.org/10.1364/AO.52.005781 CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2018

Authors and Affiliations

  1. 1.Center for Precision EngineeringHarbin Institute of TechnologyHarbinPeople’s Republic of China
  2. 2.School of Mechatronics EngineeringJilin Institute of Chemical TechnologyJilinPeople’s Republic of China

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